Papers

Peer-reviewed
2012

Real-time displacement measurement using VCSEL interferometer

OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II
  • Takamasa Suzuki
  • ,
  • Noriaki Yamada
  • ,
  • Osami Sasaki
  • ,
  • Samuel Choi

Volume
8563
Number
Language
English
Publishing type
Research paper (international conference proceedings)
DOI
10.1117/12.999720
Publisher
SPIE-INT SOC OPTICAL ENGINEERING

A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 mu m and 50 nm for displacements of 150 mu m and 1.2 mu m, respectively.

Link information
DOI
https://doi.org/10.1117/12.999720
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000319680200017&DestApp=WOS_CPL
ID information
  • DOI : 10.1117/12.999720
  • ISSN : 0277-786X
  • Web of Science ID : WOS:000319680200017

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