2012
Real-time displacement measurement using VCSEL interferometer
OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II
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- Volume
- 8563
- Number
- Language
- English
- Publishing type
- Research paper (international conference proceedings)
- DOI
- 10.1117/12.999720
- Publisher
- SPIE-INT SOC OPTICAL ENGINEERING
A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 mu m and 50 nm for displacements of 150 mu m and 1.2 mu m, respectively.
- Link information
- ID information
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- DOI : 10.1117/12.999720
- ISSN : 0277-786X
- Web of Science ID : WOS:000319680200017