2012
Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces
Proceedings of SPIE - The International Society for Optical Engineering
- ,
- ,
- ,
- Volume
- 8493
- Number
- Language
- English
- Publishing type
- Research paper (international conference proceedings)
- DOI
- 10.1117/12.929137
Sinusoidal wavelength-scanning (SWS) interferometry is unique in that a time-varying interference signal contains phase-modulation amplitude Z b due to the SWS besides a conventional phase α. Propagation time and wavefront of the light wave diffusely reflected from a metal surface can be detected from the amplitude Zb and the phase α, respectively. A concave shape with the depth of about a few hundreds microns is measured with an error less than a few microns by using only the amplitude Zb of the detected interference signal. © 2012 SPIE.
- Link information
- ID information
-
- DOI : 10.1117/12.929137
- ISSN : 0277-786X
- SCOPUS ID : 84872502921
- Web of Science ID : WOS:000312212400022