Papers

Peer-reviewed
2012

Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces

Proceedings of SPIE - The International Society for Optical Engineering
  • Osami Sasaki
  • ,
  • Takahiro Kurashige
  • ,
  • Samuel Choi
  • ,
  • Takamasa Suzuki

Volume
8493
Number
Language
English
Publishing type
Research paper (international conference proceedings)
DOI
10.1117/12.929137

Sinusoidal wavelength-scanning (SWS) interferometry is unique in that a time-varying interference signal contains phase-modulation amplitude Z b due to the SWS besides a conventional phase α. Propagation time and wavefront of the light wave diffusely reflected from a metal surface can be detected from the amplitude Zb and the phase α, respectively. A concave shape with the depth of about a few hundreds microns is measured with an error less than a few microns by using only the amplitude Zb of the detected interference signal. © 2012 SPIE.

Link information
DOI
https://doi.org/10.1117/12.929137
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000312212400022&DestApp=WOS_CPL
ID information
  • DOI : 10.1117/12.929137
  • ISSN : 0277-786X
  • SCOPUS ID : 84872502921
  • Web of Science ID : WOS:000312212400022

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