Papers

Peer-reviewed
1995

Measurement of small rotation angles by using a parallel interference pattern

Applied Optics
  • Xiaoli Dai
  • ,
  • Osami Sasaki
  • ,
  • John E. Greivenkamp
  • ,
  • Takamasa Suzuki

Volume
34
Number
28
First page
6380
Last page
6388
Language
English
Publishing type
Research paper (scientific journal)
DOI
10.1364/AO.34.006380

We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles. © 1995 Optical Society of America.

Link information
DOI
https://doi.org/10.1364/AO.34.006380
ID information
  • DOI : 10.1364/AO.34.006380
  • ISSN : 2155-3165
  • ISSN : 1559-128X
  • SCOPUS ID : 84975590030

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