MISC

2005年3月

Characteristics of two-dimensional array-type barrier microdischarges operating at high pressures of inert gases

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
  • T Sakurai
  • ,
  • S Yoshida
  • ,
  • H Yoshikawa
  • ,
  • S Yoshizawa
  • ,
  • A Morimitu

44
3
開始ページ
1441
終了ページ
1444
記述言語
英語
掲載種別
DOI
10.1143/JJAP.44.1441
出版者・発行元
JAPAN SOC APPLIED PHYSICS

The characteristics of barrier microdischarges in a two-dimensional array have been investigated under pressures of inert gases less than 18 atm. A stable discharge is obtained and vacuum ultraviolet (VUV) light emissions radiating from excimers are detected in the entire range of pressures with various scales of microdischarge. VUV light intensity is linearly proportional to an externally applied voltage. The intensity also linearly increases with pressure less than apporoximately 5 atm and gradually decreases with increasing pressure. The pressure giving a maximum intensity, p(m), increases with decreasing microhole diameter of discharge. The ratio of VUV light intensity to electric input energy of discharge increases linearly with pressure up to p(m).

リンク情報
DOI
https://doi.org/10.1143/JJAP.44.1441
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000228307400061&DestApp=WOS_CPL
ID情報
  • DOI : 10.1143/JJAP.44.1441
  • ISSN : 0021-4922
  • Web of Science ID : WOS:000228307400061

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