2005年3月
Characteristics of two-dimensional array-type barrier microdischarges operating at high pressures of inert gases
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
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- 巻
- 44
- 号
- 3
- 開始ページ
- 1441
- 終了ページ
- 1444
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1143/JJAP.44.1441
- 出版者・発行元
- JAPAN SOC APPLIED PHYSICS
The characteristics of barrier microdischarges in a two-dimensional array have been investigated under pressures of inert gases less than 18 atm. A stable discharge is obtained and vacuum ultraviolet (VUV) light emissions radiating from excimers are detected in the entire range of pressures with various scales of microdischarge. VUV light intensity is linearly proportional to an externally applied voltage. The intensity also linearly increases with pressure less than apporoximately 5 atm and gradually decreases with increasing pressure. The pressure giving a maximum intensity, p(m), increases with decreasing microhole diameter of discharge. The ratio of VUV light intensity to electric input energy of discharge increases linearly with pressure up to p(m).
- リンク情報
- ID情報
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- DOI : 10.1143/JJAP.44.1441
- ISSN : 0021-4922
- Web of Science ID : WOS:000228307400061