後藤 俊夫

Silicon-oxide etching process employing an electron-beam-excited plasma 

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 22(2) 543-547 2004年3月  

Effects of driving frequency on the translational temperature and absolute density of Si atoms in very high frequency capacitively coupled SiF4 plasmas 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 42(12B) L1532-L1534 2003年12月  

Generation of squeezed vacuum using spectral filter by spatial light modulator and nonlinear polarization interferometer 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 42(8) 5048-5051 2003年8月  

Etching organic low dielectric film in ultrahigh frequency plasma using N-2/H-2 and N-2/NH3 gases 

JOURNAL OF APPLIED PHYSICS 94(3) 1362-1367 2003年8月  

Measurement of Si, SiF, and SiF2 radicals and SiF4 molecule using very high frequency capacitively coupled plasma employing SiF4 

JOURNAL OF APPLIED PHYSICS 94(3) 1428-1435 2003年8月  

Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp 

REVIEW OF SCIENTIFIC INSTRUMENTS 74(7) 3453-3459 2003年7月  

Fabrication of multilayered SiOCH films with low dielectric constant employing layer-by-layer process of plasma enhanced chemical vapor deposition and oxidation 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 42(5A) 2775-2779 2003年5月  

Measurement of C-2 radical density in microwave methane/hydrogen plasma used for nanocrystalline diamond film formation 

DIAMOND AND RELATED MATERIALS 12(3-7) 365-368 2003年3月  

Effects of oxygen and nitrogen atoms on SiOCH film etching in ultrahigh-frequency plasma 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 42(3B) L326-L328 2003年3月  

Plasma induced subsurface reactions for anisotropic etching of organic low dielectric film employing N-2 and H-2 gas chemistry 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 42(3A) L212-L214 2003年3月  

Ultrafast all Optical Switching by Use of Pulse Trapping Across Zero－Dispersion Wavelength 

Opt. Express 11(4) 359-365 2003年2月  

Wavelength-Tunable Femtosecond Soliton Pulse Generation for Wavelengths of 0.78－1.0μm Using Photonic Crystal Fibers and a Ultrashort Fiber Laser 

Jpn. J. Appl. Phys 42(2A) 449-452 2003年2月  

Wavelength-tunable femtosecond soliton pulse generation for wavelengths of 0.78-1.0 mu m using photonic crystal fibers and a ultrashort fiber laser 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 42(2A) 449-452 2003年2月  

Synthesis of polytetrafluoroethylene-like films by a novel plasma enhanced chemical vapor deposition employing solid material evaporation technique 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 42(2A) 650-656 2003年2月