2020年3月8日
Estimation of electrical properties of AlGaN/GaN MIS-HEMTs with SiO2/Al2O3 double-layer insulators fabricated by atomic layer deposition
13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science
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- 記述言語
- 英語
- 会議種別
- 口頭発表（一般）