2012年
Production of Extremely Low Energy Electron Beam with Silicon-Based Field Emitter Arrays and Its Application to Space Charge Neutralization of Low-Energy and High-Current Ion Beam
2012 25TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC)
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- 開始ページ
- 86
- 終了ページ
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- 記述言語
- 英語
- 掲載種別
- 研究発表ペーパー・要旨(国際会議)
- DOI
- 10.1109/IVNC.2012.6316868
- 出版者・発行元
- IEEE COMPUTER SOC
An electron beam with an energy as low as 5 eV and a current of 0.1 mA was produced by an electron source with a 10,000-tip silicon-based field emitter array (Si-FEA). In order to decelerate the electrons, we have designed an electrostatic lens system for the divergent beam extracted from the FEA. Spatial distribution of the electrons was investigated by a fluorescent screen with a multiple channel plate. Finally, space charge neutralization of low-energy and high-current ion beam was demonstrated with the present electron source.
- リンク情報
- ID情報
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- DOI : 10.1109/IVNC.2012.6316868
- ISSN : 2164-2370
- Web of Science ID : WOS:000312875600031