MISC

2003年

The Field Emitter Array for neutralization of positive ion charge in ion implantation system

Technical Digest of the 16th International Vacuum Microelectronics Conference

Ikejiri T
Sakai S
Umisedo S
Naito K
Nagai N
Nagao M
Kanemaru S
Ishikawa J
Gotoh Y
Tsuji H

開始ページ: 85
終了ページ: 86
DOI: 10.1109/IVMC.2003.1222995

リンク情報

DOI: https://doi.org/10.1109/IVMC.2003.1222995
Web of Science: https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000186383200043&DestApp=WOS_CPL
URL: http://orcid.org/0000-0002-2862-8321

ID情報

DOI : 10.1109/IVMC.2003.1222995
ORCIDのPut Code : 45106761
Web of Science ID : WOS:000186383200043

エクスポート: BibTeX RIS

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