An extractor, which is expected to play a significant role in the improvement of the electron emission efficiency of a cone-shaped metal-insulator-semiconductor (MIS) cathode, has been successfully fabricated using self-aligned photolithography. The present method requires the mask patterning to be carried out only once. Also, sharpening of the cone apex was achieved by retaining the SiO2 mask during the oxidation process. The fabricated devices at each step, of tile process were observed with a scanning electron microscope (SEM) and formation of preferable structure for electron emission was confirmed. The diode characteristics of the fabricated MIS cathode were similar to those of tile previously fabricated cathodes without the outside electrode. It was also observed that the external electric field decreased tile threshold voltage of the electron emission.