論文

査読有り
1997年9月

Stability of field emission current from boron-doped diamond thin films terminated with hydrogen and oxygen

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
  • M Nagao
  • ,
  • T Kondo
  • ,
  • Y Gotoh
  • ,
  • H Tsuji
  • ,
  • J Ishikawa
  • ,
  • K Miyata
  • ,
  • K Kobashi

36
9AB
開始ページ
L1250
終了ページ
L1253
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1143/jjap.36.L1250
出版者・発行元
JAPAN SOC APPLIED PHYSICS

The stability of field emission current from B-doped diamond thin films terminated with hydrogen and oxygen mas measured to investigate the influence of the surface treatment and the dopant concentration on the emission stability. The diamond films sere prepared by microwave plasma chemical vapor deposition. The O-termination was performed by acid cleaning in boiling chromic acid and boiling aqua regia, The H-termination was performed by exposing the above sample to hydrogen plasma. The dependence of the emission stability on the B2H6 gas (dopant gas) concentration and the surface treatment Ras investigated. As a result, Little dependence on the B concentration nas observed, but dependence on the surface treatment was significant. The field emission of the H-terminated diamond thin films was confirmed to be more stable than the O-terminated films.

リンク情報
DOI
https://doi.org/10.1143/jjap.36.L1250
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:A1997YA47500037&DestApp=WOS_CPL
ID情報
  • DOI : 10.1143/jjap.36.L1250
  • ISSN : 0021-4922
  • Web of Science ID : WOS:A1997YA47500037

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