2010年3月
Development of in situ analyzer of field-emission devices
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
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- 巻
- 28
- 号
- 2
- 開始ページ
- C2A77
- 終了ページ
- C2A82
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1116/1.3325835
- 出版者・発行元
- A V S AMER INST PHYSICS
The authors are developing an in situ analyzer of field-emission devices that is based on the Seppen-Katamuki (SK) analysis, and they report preliminary results as proof of concept. One of the major differences in the present system from the conventional system is that field-emission characteristics are measured under modulation of emitter voltage. This enables to generate a SK plot, which requires the intercept and slope of the Fowler-Nordheim plot. Field-emission microscope images are acquired by a charge-coupled device camera. The field-emission characteristics of a tungsten-needle emitter were acquired and the SK plots were generated. They found that the fluctuation of field-emission current analyzed by the present system was expressed by motion along a linear line in the SK chart. The above result agrees with those obtained by previous studies.
- リンク情報
- ID情報
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- DOI : 10.1116/1.3325835
- ISSN : 1071-1023
- Web of Science ID : WOS:000276275100043