論文

査読有り
2010年3月

Development of in situ analyzer of field-emission devices

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
  • Michito Kawasaki
  • ,
  • Zhen He
  • ,
  • Yasuhito Gotoh
  • ,
  • Hiroshi Tsuji
  • ,
  • Junzo Ishikawa

28
2
開始ページ
C2A77
終了ページ
C2A82
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1116/1.3325835
出版者・発行元
A V S AMER INST PHYSICS

The authors are developing an in situ analyzer of field-emission devices that is based on the Seppen-Katamuki (SK) analysis, and they report preliminary results as proof of concept. One of the major differences in the present system from the conventional system is that field-emission characteristics are measured under modulation of emitter voltage. This enables to generate a SK plot, which requires the intercept and slope of the Fowler-Nordheim plot. Field-emission microscope images are acquired by a charge-coupled device camera. The field-emission characteristics of a tungsten-needle emitter were acquired and the SK plots were generated. They found that the fluctuation of field-emission current analyzed by the present system was expressed by motion along a linear line in the SK chart. The above result agrees with those obtained by previous studies.

リンク情報
DOI
https://doi.org/10.1116/1.3325835
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000276275100043&DestApp=WOS_CPL
ID情報
  • DOI : 10.1116/1.3325835
  • ISSN : 1071-1023
  • Web of Science ID : WOS:000276275100043

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