2010年
Suppression of Divergence of Low Energy Ion Beams by Space Charge Neutralization with Low Energy Electrons Emitted from Field Emitter Arrays
ION IMPLANTATION TECHNOLOGY 2010
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- 巻
- 1321
- 号
- 開始ページ
- 496
- 終了ページ
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- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1063/1.3548461
- 出版者・発行元
- AMER INST PHYSICS
Suppression of divergence of low energy neon ion beam was experimentally demonstrated by neutralizing the space charge of ion beam with low energy electrons emitted from silicon field emitter arrays (Si-FEAs). Treatment of the FEAs with trifluoromethane plasma realized surface carbonization which was efficient to elongate the lifetime of the FEA and to improve the electron energy distribution. Together with the improvement of the performance of Si-FEA, we have developed a novel electron deceleration system to produce low energy electrons. A low energy neon ion beam was produced and the beam property was investigated with and without the electron supply from surface carbonized Si-FEA (Si:C-FEA). As a result, the divergence of the neon ion beam was largely suppressed with presence of the electrons.
- リンク情報
- ID情報
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- DOI : 10.1063/1.3548461
- ISSN : 0094-243X
- Web of Science ID : WOS:000288402500120