YASUTAKE Kiyoshi

J-GLOBAL         Last updated: Aug 25, 2011 at 00:00
 
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Name
YASUTAKE Kiyoshi
Affiliation
Osaka University
Section
Graduate School of Engineering, Division of Precision Science & Technology and Applied Physics
Job title
Professor
Degree
Doctor

Research Areas

 
 

Misc

 
Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure
Proc. 7th Int. Precision Engineering Seminar, Kobe   554-565    1993
Interface Parameters and Surface Recombination Velocity at PECVD SiO2/Si Interface
Technical Digest of the Sixth Sunshine Workshop on Crystalline Silicon Solar Cells, Tokyo   113-116   1993

Books etc

 
MINORITY CARRIER DIFFUSION LENGTH AND DEFECT LEVELS IN PLASTICALLY DEFORMED SILICON CRYSTALS
Defect Control in Semiconductors II   1990   

Works

 
Center of Excellence for Atomically Controlled Fabrication Technology
2008

Research Grants & Projects

 
Fabrication and Characterization of Semiconductor Thin Films
The Other Research Programs
Low Temperature Growth of Functional Material Thin Films with High Growth Rate
The Other Research Programs

Patents

 
Dry Etching Method and Apparatus
US006355569B1