三宅 正司

Preparation of high quality strontium titanate based thin films by ECR plasma sputtering 

Surface and Coating Technology 169-170, 27-31. 2003年  

Preparation of High Quality Perovskite Oxide Films by ECR Plasma Sputtering and Millimeter-wave Irradiation 

Proc. of 3rd Intl. Conf. on Surface Engineering, Oct. 10-13, Chengdu, China, 62-66. 2002年  

Low Temperature Processing of Bulk and Thin Film Ceramics by Microwave Radiation 

D5 Abst. Intl. Workshop of Strong Microwaves in Plasma, Nizhny Novgorod, Russia, Aug. 1-9, 2002年  

Development of high-density RF plasma and application to PVD 

Surf. and Coat. Technol., 131,171-176. 2000年  

Internal-antenna-driven inductive RF discharges for development of large-area high-density plasma sources with suppressed electrostatic coupling 

Vacuum 59, 472-478. 2000年  

Properties of Depth-Profile Controlled Boron Nitride Films Prepared by Ion-Beam Assisted Deposition 

Nucl. Instr. and Meth. in Phys. Res., B127(128) 977-980. 1997年  

Inductively Coupled Reactive High-Density Plasmas Designed For Sputter Deposition 

Proc. 5th Int. Conf. on Plasma Surface Engineering, 1996年  

Influence of Local Feature of Electron Cyclotron Resonance Plasma on the Formation of Amorphous Hydrogenated Silicon Films 

Jpn. J. Appl. Phys., 34, 285-291. 1995年  

Titanium Oxide Formation by Dynamic Ion Beam Mixing 

J. Vac. Sci. & Technol. A9, 3036-3040. 1991年  

Focusing of High Power Millimeter-Wave Radiation by a Quasi-Optical Antenna System 

Int. J. Electronics 70, 979-988. 1991年  

Production of ECR Mirror Plasma by High Power Millimeter-wave Radiation 

Jpn.J.Appl.Phys., Vol. 27, No.7, 1281-1286. 1988年  

Properties of ECR Plasma in a Simple Mirror Field Ⅱ- Spatial Structure of the Plasma – 

Jpn.J.Appl.Phys., Vol. 26, No.12, 2079-2085. 1987年  

Properties of ECR Plasma in a Simple Mirror Field Ⅰ- Correlation in Cold and Hot Electron Production – 

Jpn.J.Appl.Phys., Vol. 26, No.12, 2072-2078. 1987年  

Laser-induced Fluorescence and Doppler-free Polarization Spectra in a Low Density Hydrogen Plasma 

Jpn. J. Appl. Phys. Vol. 26, No.3, 331-335. 1987年  

Measurements of Stark Broadening of HE(Ⅱ) 4686Å, J. Quantitative 

Spectroscopy and Radiative Transfer Vol. 32, No. 4, 343-351. 1984年  

high Power Micorwave Discharge in Atmospheric Hydrogen Gas Flow 

J. Phys. Soc. Japan Vol.44, No.3, 998-1003. 1978年  

Dynamic Contrl of a Cusp Plasma near the Ion Cyclotron Frequency 

J. Phys. Soc. Japan Vol. 31, No.1, 265-272. 1971年