MISC

2005年

Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
  • Y Kamiura
  • ,
  • M Kaneshiro
  • ,
  • J Tamura
  • ,
  • T Ishiyama
  • ,
  • Y Yamashita
  • ,
  • T Mitani
  • ,
  • T Mukai

44
28-32
開始ページ
L926
終了ページ
L928
記述言語
英語
掲載種別
DOI
10.1143/JJAP.44.L926
出版者・発行元
INST PURE APPLIED PHYSICS

We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400 degrees C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400 degrees C for 30 min. The enhanced blue emission was stable up to 500 degrees C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at E-c - 0.37 eV involved in the DAP emission.

Web of Science ® 被引用回数 : 10

リンク情報
DOI
https://doi.org/10.1143/JJAP.44.L926
CiNii Articles
http://ci.nii.ac.jp/naid/10016681344
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000231426100013&DestApp=WOS_CPL
ID情報
  • DOI : 10.1143/JJAP.44.L926
  • ISSN : 0021-4922
  • CiNii Articles ID : 10016681344
  • Web of Science ID : WOS:000231426100013

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