- INST PURE APPLIED PHYSICS
We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400 degrees C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400 degrees C for 30 min. The enhanced blue emission was stable up to 500 degrees C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at E-c - 0.37 eV involved in the DAP emission.
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- DOI : 10.1143/JJAP.44.L926
- ISSN : 0021-4922
- CiNii Articles ID : 10016681344
- Web of Science ID : WOS:000231426100013