As for the liquid crystal display manufacture, the rubbing method has been widely used as an alignment treatment method. The rubbing scratches occur on the alignment film by directly rubbed with cloth on it. It supposed to generate relating the hardness of alignment film, however, the evaluation for the liquid crystal displays with regarded to the hardness of alignment film has not been investigated yet. In this study, the pretilt angle and the twist angle by means of ellipsometry and the surface free energy for the planar alignment film will be totally investigated from the viewpoint of Vickers hardness.