論文

査読有り
2015年2月

Two-dimensional high-speed and long-range tomography and profilometry using liquid-crystal Fabry–Perot resonator

Applied Optics
  • Tuan Quoc Banh
  • ,
  • Kohei Suzuki
  • ,
  • Munehiro Kimura
  • ,
  • Tatsutoshi Shioda

54
4
開始ページ
912
終了ページ
918
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1364/AO.54.000912
出版者・発行元
Optical Society of America

A two-dimensional high-speed, long-range tomography and profilometry based on a low-coherence optical interferometry has been developed. A liquid-crystal Fabry–Perot resonator is fabricated to be a low-coherence optical frequency comb generator for expanding the measurement depth of the tomography and profilometry. The line-shape interference fringes with the individual fringe orders are obtained by a CCD camera in real time. The relative optical length, corresponding to the sample depth information, can be derived from the positions of the interference fringes on the CCD camera and their corresponding fringe orders. The fringe orders can be rapidly calculated using the effectiveness of the changeable extraordinary refractive index of the liquid-crystal material of the resonator. The finesse of the liquid-crystal resonator is approximate 9, giving an expansion of the measurement range of up to 9-fold (&0d0a;∼8  mm depth) with a resolution of profilometry and tomography of 3.7 μm and 11 μm, respectively.

リンク情報
DOI
https://doi.org/10.1364/AO.54.000912
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000349161300075&DestApp=WOS_CPL
URL
https://www.osapublishing.org/ao/abstract.cfm?uri=ao-54-4-912
ID情報
  • DOI : 10.1364/AO.54.000912
  • ISSN : 1559-128X
  • eISSN : 2155-3165
  • Web of Science ID : WOS:000349161300075

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