YABE Eiji

J-GLOBAL         Last updated: Feb 3, 2006 at 00:00
 
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Name
YABE Eiji
Degree
(BLANK), (BLANK)

Research Interests

 
 

Research Areas

 
 

Education

 
 
 - 
1968
Graduate School, Division of Engineering, Tokai University
 
 
   
 
Graduate School, Division of Engineering, Tokai University
 
 
 - 
1964
Electric power, Faculty of Engineering, Tokai University
 

Misc

 
Nucl. Instr & Meth   B6    1985
Vacuum   36(1/3) 43-45   1986
Plasma filament Ion Source for high current Implanter
Nucl. Instr. & Meth   B21    1987
Rev. Sci. Instrum.   52(1)    1987
Production of Ion Beam Using plasma filament Ion Source
Jpn. J. Appl. phys.   26(7)    1987

Research Grants & Projects

 
Development of rf plasma source using a magnetic line cusp field