MISC

査読有り
2016年5月

Development of a mass spectrometer using two rotating electric fields

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
  • Masashi Nojima
  • ,
  • Yuki Anai
  • ,
  • Masanao Hotta
  • ,
  • Satoshi Kurumi
  • ,
  • Kaoru Suzuki
  • ,
  • Tatsuya Adachi
  • ,
  • Takashi Kusanagi
  • ,
  • Kosuke Moritani

34
3
開始ページ
03H132-1
終了ページ
03H132-4
記述言語
英語
掲載種別
DOI
10.1116/1.4944838
出版者・発行元
A V S AMER INST PHYSICS

The authors propose a new principle for a mass analyzer involving a pair of rotating electric fields (REFs). Its design is reviewed from the perspectives of electronics, ion optics, and operating principle. The use of REFs to separate ions by mass was demonstrated by introducing a Ga focused-ion-beam column directly into the REFs optical system. By optimizing the system phase contrast, the Ga-69(+) ions were made to converge to the central axis while the Ga-71(+) formed an annular pattern. Asymmetries in annular patterns are caused by nonuniformity in the alternating current voltage of each REF electrode. By varying the frequency, the locations of the Ga-69(+) and Ga-71(+) projections can be exchanged between the center and exterior. (C) 2016 American Vacuum Society.


リンク情報
DOI
https://doi.org/10.1116/1.4944838
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000377673400032&DestApp=WOS_CPL
ID情報
  • DOI : 10.1116/1.4944838
  • ISSN : 2166-2746
  • Web of Science ID : WOS:000377673400032

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