2018年10月
Method to measure the size distribution of massive cluster ion beams using two rotating electric fields
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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- 巻
- 432
- 号
- 開始ページ
- 1
- 終了ページ
- 4
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.nimb.2018.06.018
- 出版者・発行元
- ELSEVIER SCIENCE BV
We developed a gas cluster ion beam (GCIB) source in conjunction with a two rotating electric fields (REFs)-type mass filter. The REFs method is suitable for a mass filter of a massive cluster ion beam because masses can be separated from a continuous ion beam with a constant mass resolution in all mass ranges. In principle, the mass range is unlimited. Using this apparatus, we measured the size distribution of an Ar cluster ion beam. The REFs method has a wide mass range of at least 40 similar to 160,000 Da. The peak cluster size of the Ar cluster ion beam generated in this apparatus is 900. The annular patterns projected onto a fluorescent screen by Ar+ indicate that the maximum estimated mass resolution (M/Delta M) for the REFs mass filter is 86 for the full width at half maximum (FWHM) at a beam diameter of 0.12 mm (empty set). This mass filter should realize new applications of size-selected massive cluster ion beams as well as the study of cluster physics.
- リンク情報
- ID情報
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- DOI : 10.1016/j.nimb.2018.06.018
- ISSN : 0168-583X
- eISSN : 1872-9584
- Web of Science ID : WOS:000442056700001