2001年
Effects of heat treatment on structure of amorphous CNx thin films by pulsed laser deposition
Thin Solid Films
- 巻
- 62, 389-393
- 号
- DOI
- 10.1016/S0040-6090(01)00888-4
- ID情報
-
- DOI : 10.1016/S0040-6090(01)00888-4