2001年
Precipitation-Enhanced Diffusion of Nickel in Dislocation-Free Silicon Studied by IN-Diffusion and Annealing Processes
Physica B
- 巻
- 308-310, 427-430
- 号
- DOI
- 10.1016/S0921-4526(01)00774-8
- ID情報
-
- DOI : 10.1016/S0921-4526(01)00774-8