An extended X-ray absorption fine structure (EXAFS) method was applied to YBa2Cu3-xFexOy with x=0.05, 0.1, 0.2, 0.3, 0.4 and 0.5. Fe atoms are surrounded by six oxygen atoms with a distance of about 1.85 Å, and they mainly substitute for the Cu(1) site over the whole concentration range. The local structures around Cu atoms and Y atoms are also reported. © 1989 The Japan Society of Applied Physics.