KAWAI Akira

J-GLOBAL         Last updated: Jan 13, 2018 at 02:57
 
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Name
KAWAI Akira
E-mail
kawainagaokaut.ac.jp

Research Areas

 
 

Academic & Professional Experience

 
Apr 1983
 - 
Mar 1993
manager, Mitsubishi Electric Corporation, ULSI Laboratory
 

Education

 
 
 - 
Aug 1992
Graduate School, Division of Engineering, Nagaoka University of Technology
 
 
 - 
Mar 1983
Graduate School, Division of Engineering, Nagaoka University of Technology
 
 
 - 
Mar 1981
Faculty of Engineering, Nagaoka University of Technology
 

Awards & Honors

 
Jun 2005
Photopolymer Science and Technology Award
 
Jun 2002
Paper award
 

Published Papers

 
Hiroki Nakano, Kenta Takahashi
J. Photopolymer Science and Technology   29(4) 603-606   May 2016   [Refereed]
Kunii Yako, Akira Kawai
J. Photopolym. Sci. Technol.   27(6) 27-31   Dec 2014   [Refereed]
Yosuke Sakurai, Kenta Takahashi, Akira Kawai
J. Photopolymer Science and Technology   26(6) 727-732   Dec 2013   [Refereed]
Yosuke Sakurai, Daisuke Tanaka, Shunsuke Ohata, Akira Kawai
J. Photopolymer Science and Technology   26(6) 751-756   Dec 2013   [Refereed]
J. Photopolymer Sci. Technol   18(3) 373-380   Apr 2005   [Refereed]

Misc

 
J. Photopolymer Science and Technology   18(6) 729-736   Apr 2005
Coating Theory and Phenomenon for the Plant, Chapter 1, Session 1 Coating Fundamentals: Wetting
CONVERTECH   4(6) 20-24   Dec 2014
Coating Theory and Phenomenon for the Plant, Chapter 1, Session 2 Coating Fundamentals: Surface Energy
CONVERTECH & e-Print   5(1) 90-95   Jan 2015
Coating Theory and Phenomenon for the Plant, Chapter 1, Session 3 Coating Fundamentals: Hydrophobing Treatment
CONVERTECH & e-Print   5(2) 96-102   Mar 2015
Coating Theory and Phenomenon for the Plant, Chapter 2, Session 5 Drying Defects Part1
CONVERTECH & e-Print   6(2) 88-94   Mar 2015

Conference Activities & Talks

 
Condensation behavior of nanoscale bubbles on ArF excimer resist surface analyzed by atomic force microscope
International symposium on materials & processes for advanced giga-bit-scale lithography 2005   28 Jun 2005   
(Invited paper) Micro bubbles capturedby micro defect on flat substrate
2004 Beijing International Bonding Technology Symposium (CSB2004)   23 Oct 2004   
Adhesion and cohesion properties of micro condensed matter analyzed by atomic force microscope (AFM)
2004 Beijing International Bonding Technology Symposium (CSB2004)   23 Oct 2004   
Cohesion property of resist pattern surface analyzed by tip indentation method
International symposium on materials & processes for advanced giga-bit-scale lithography 2004   23 Jun 2004   
(Invited paper) Cohesion property of resist micro pattern analyzed by using atomic force microscope (AFM)
International symposium on materials & processes for advanced giga-bit-scale lithography 2003   12 Jun 2003   

Research Grants & Projects

 
Development of nano-micro system devices
Grant-in-Aid for Scientific Research
Project Year: Apr 1993 - Today
Development of device process
Grant-in-Aid for Scientific Research
Project Year: Apr 1993 - Today
Development of nanoscale measurement system
Grant-in-Aid for Scientific Research
Project Year: Apr 1993 - Today