2013年
Local Heating System Integrated with Platinum Micro Heater and Photopolymer Microfluidic Channel
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
- ,
- 巻
- 26
- 号
- 6
- 開始ページ
- 713
- 終了ページ
- 716
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.2494/photopolymer.26.713
- 出版者・発行元
- TECHNICAL ASSOC PHOTOPOLYMERS,JAPAN
Local heating system composed with micro heater and microfluidic channel is designed and fabricated. Micro heater made of platinum film is formed on a slide glass by radio-frequency magnetron sputtering and lift-off processes. Microfluidic channel is designed to surround the micro heater. A SU-8 epoxy-based negative photoresist is employed as micro channel material and patterned by lithography process. The micro heater has ability to heat over 350 degrees C at an electric power of 3.12W. Local heating property is evaluated by applying DC electric power. Heating area decreases 61.5% for micro channel filled with water by comparison with empty channel. Temperature of water in the micro channel is rise up 3.5 degrees C and heat absorption, which is estimated about 275.3 mu J. The microfluidic channel with water is an effective method for local hearing. The local heating system with integration of micro heater and channel is one candidate which can apply to various fields such as biological and biomedical tools.
- リンク情報
- ID情報
-
- DOI : 10.2494/photopolymer.26.713
- ISSN : 0914-9244
- Web of Science ID : WOS:000331352800005