2014年5月
Preparation of [100] oriented SrTiO3 thin films on flexible polymer sheets
JAPANESE JOURNAL OF APPLIED PHYSICS
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- 巻
- 53
- 号
- 5
- 開始ページ
- 05FB06.1-05FB06.4
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.7567/JJAP.53.05FB06
- 出版者・発行元
- IOP PUBLISHING LTD
In this study, we prepared a uniaxially oriented oxide on a flexible polymer substrate. We first grew [100] oriented SrTiO3 (STO) on a MgO(100) substrate. After bonding the STO film to a poly(ethylene naphthalete) (PEN) sheet with a photoresist, we etched the MgO substrate with a phosphoric acid solution to transfer the oxide film to the PEN sheet. The thin (300nm) STO films did not crack after release, even after bending the sheet around a rod with a 1cm radius, while the thicker (800 nm) films did. Ultimately, this process could be adapted to prepare a flexible epitaxial oxide. (C) 2014 The Japan Society of Applied Physics
- リンク情報
- ID情報
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- DOI : 10.7567/JJAP.53.05FB06
- ISSN : 0021-4922
- eISSN : 1347-4065
- J-Global ID : 201402263283316370
- Web of Science ID : WOS:000338316200020