Hiroyuki Sakaue

Fabrication of the sulfur-terminated Ge(111) surface

Y. Fujishima, Y. Hanabusa, H. Suzuki, T. Takahagi, and H. Sakaue

15th International Conf. on the Formation of Semiconductor Interfaces, Nov 15, 2015 Peer-reviewed

Fabrication of dimer of silver nanoparticles for surface enhanced raman scattering

Colloids and Materials 2011, -(-) P3.95, May 1, 2011 Peer-reviewed

Fabrication of dimer of silver nanoparticles for surface enhanced raman scattering

Colloids and Materials 2011, -(-) P3.95, May 1, 2011

Flipping behavior of porphyrin derivative molecule on Au (111)

Abs. 9th International Conference on Nano-Molecular Electronics, 148, Dec 1, 2010

Controlled motion of dynein-microtubule system by patternd resist polymer

Abs. 9th International Conference on Nano-Molecular Electronics, 83, Dec 1, 2010

Flipping behavior of porphyrin derivative molecule on Au (111)

Abs. 9th International Conference on Nano-Molecular Electronics, 148, Dec 1, 2010

Controlled motion of dynein-microtubule system by patterned resist polymer

Abs. 9th International Conference on Nano-Molecular Electronics, 83, Dec 1, 2010

Activation energy of flipping behavior of porphyrin derivative molecule on Au(111)

Abs. 5th International Meeting on Molecular Electronics, 326, Dec 1, 2010

Chemical Structures of Ge (111) Surface Treated by Hydrogen Halide Aqueous Solutions

The 15th International Conf. on Solid Films and Surfaces (ICSFS-15, Beijing), -, Oct 1, 2010

X線光電子分光法を用いたダイヤモンドライクカーボンの化学構造解析

鷹林将, 岡本, 圭司, 中谷, 達行, 坂上, 弘之, 高萩隆行

炭素, 280-289, Oct 1, 2008 Peer-reviewed

PHOTOELECTERON SPECTROSCOPIC ANALYSIS OF CHEMICAL STRUCTURE OF DIAMONDLIKE CARBON WITH DIFFERENT ELECTRICAL RESISTIVITIES

2008 International Conference on Carbon (CARBON'08), Jul 1, 2008

X-ray Photoelectron Analysis of Diamondlike Carbon (DLC) Films with Different Electric Resistivities

The 9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-9), Nov 11, 2007

New method to calibrate binding energy using Au nanocolloids in X-ray photoelectron analysis of diamondlike carbon films with different electrical resistivities

Appl. Surf. Sci., 254 2666-2670, Nov 1, 2007 Peer-reviewed

Experimental study of temperatures of atmospheric-pressure nonequilibrium Ar/N-2 plasma jets and poly(ethylene terephtalate)-surface processing

Toshifumi Yuji, Yoshifumi Suzaki, Takashi Yamawaki, Hiroyuki Sakaue, Hiroshi Akatsuka

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 46(2) 795-798, Feb, 2007 Peer-reviewed

Immobilization of Gold Nanoparticles on Silanized Substrate for Sensors Based on Localized Surface Plasmon Resonance

e-J. Surf. Sci. Nanotech., 5 1-6, Jan 1, 2007 Peer-reviewed

Electrical Characteristics of Low Dielectric Porous Diamond Film Composed by Diamond Nano-particles

Abstracts of 13th International Conf. on Solid Films and Surfaces, 47 (PI-02), Nov 1, 2006

Fabrication of the Ordered Dangling Bond Rows on Hydrogen Terminated Si(111) Surface with Periodic Step/Terrace Structure

Abstracts of 13th International Conf. on Solid Films and Surfaces, 240 (PIII-55), Nov 1, 2006

Surface Cleaning of PET Films with an Atmospheric Pressure Dielectric Barrier Discharge

Abstracts of 8th Asia-Pacific Conference on Plasma Science and Technology, 197, Jul 1, 2006

Epitaxial Growth of Cu Nanodot Arrays Using an AAO Template on a Si Substrate

Electrochem. Solid-State Letters, 9(4) J13-J16, Apr 1, 2006 Peer-reviewed

Epitaxial growth of Cu nanodot arrays using an AAO template on a Si substrate

T Shimizu, M Nagayanagi, T Ishida, O Sakata, T Oku, H Sakaue, T Takahagi, S Shingubara

ELECTROCHEMICAL AND SOLID STATE LETTERS, 9(4) J13-J16, 2006 Peer-reviewed

Nanometer-Scale Control of Film Thickness and Pattern Width of Alkyl SAM on H-Terminated Si(111) Surface

International Symp. on Surface Science and Nanotechnology, 536, Nov 1, 2005

Nano-patterning of Organic Molecules on H-terminated Si Surface by AFM

8th International Conf. on Atomically Controlled Surfaces, Interfaces and Nanostructures, 114, Jun 1, 2005

Characterization of electroless-plated Cu film over Pd catalytic layer formed by an ionized cluster beam

ZL Wang, S Shingubara, H Sakaue, T Takahagi

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(10) C684-C687, 2005 Peer-reviewed

Bottom-up fill for submicrometer copper via holes of ULSIs by electroless plating

J. Electrochem. Soc., 151(12) C781-C785, Dec 1, 2004 Peer-reviewed

Effect of additives on hole filling characteristics of electroless copper plating

Jpn. J. Appl. Phys., 43(10) 7000-7001, Oct 1, 2004 Peer-reviewed

Large Negative Resistance Property Observed in 3-D Network of DNA and Gold Nanoparticle Formed by DNA Mediated Self-organization

2004 International Conf. on Solid State Devices and Materials, 114-115, Aug 1, 2004

Wet treatment for preparing atomically smooth Si(100) wafer surface

Appl. Surf. Sci., 234 439-444, Jun 1, 2004 Peer-reviewed

Bottom-up fill of Cu in deep submicron holes by electroless plating

Electrochem. Solid-State Letters, 7 C78-C80, Jun 1, 2004 Peer-reviewed

Aspect Ratio Dependence of Magnetic Hysteresis Property of High Density Co Wire Array Buried In Porous Alumina Template

J. Magnetics and Magnetic Materials, 272-276 1598-1599, Jun 1, 2004 Peer-reviewed

自己組織化ポーラスアルミナ・ナノホール配列に埋め込み形成した強磁性体ナノ構造体の結晶構造解析

新宮原, 正三, 清水智弘, 永柳衛, 呉光日, 高萩, 隆行, 坂田修身

文部科学省ナノテクノロジー総合支援プロジェクト Spring-8研究成果報告書, 3 42-44, Jun 1, 2004

Self-organization of a porous alumina nanohole array using a sulfuric/oxalic acid mixture as electrolyte

Electrochem. Solid-State Letters, 7(3) E15-E17, Mar 1, 2004 Peer-reviewed

Formation of 10 nm Continuous Cu Film in a Fine Hole by Electroless Plating for Seed Layer Application

Mat. Res. Soc. Symp. Proc., ULSI-XIX 567, Mar 1, 2004 Peer-reviewed

Bottom-up fill for submicrometer copper via holes of ULSIs by electroless plating

ZL Wang, O Yaegashi, H Sakaue, T Takahagi, S Shingubara

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 151(12) C781-C785, 2004 Peer-reviewed

Bottom-up fill of copper in deep submicrometer holes by electroless plating

S Shingubara, ZL Wang, O Yaegashi, R Obata, H Sakaue, T Takahagi

ELECTROCHEMICAL AND SOLID STATE LETTERS, 7(6) C78-C80, 2004 Peer-reviewed

Self-organization of a porous alumina nanohole array using a sulfuric/oxalic acid mixture as electrolyte

S Shingubara, K Morimoto, H Sakaue, T Takahagi

ELECTROCHEMICAL AND SOLID STATE LETTERS, 7(3) E15-E17, 2004 Peer-reviewed

Preparation of Atomic-Scale Level Smooth Si(100) Surface using Wet Treatment

Abstracts of 7th Int. Conf. on Atomically Controlled Surfaces Interfaces and Nanostructures (ACSIN-7), 228, Nov 1, 2003

Highly Adhesive Electroless Cu Layer Formation Using an Ultra Thin Ionized Cluster Beam (ICB)-Pd Catalytic Layer for Sub-100nm Cu Interconnections

Jpn. J. Appl. Phys., 42(10B) L1223-L1225, Oct 1, 2003 Peer-reviewed

Electroless Copper Seed Activated by 1nm ICB-Pd Catalytic Layer for Fine Cu Interconnections

Proc. of Int. Conf. On Solid State Devices and Materials 2003, 456-457, Sep 1, 2003

Wet Treatment for Preparing Atomically Smooth Si(100) Wafer Surface

Abstracts of 9th Int. Conf. on Formation of Semiconductor Interfaces (ICFSI-9), 46, Sep 1, 2003

Low dielectric constant porous diamond films formed by diamond nanoparticles

Appl. Phys. Lett., 83(11) 2226-2228, Sep 1, 2003 Peer-reviewed

Thickness dependences of nucleation and annihilation fields of magnetic vortices in submicron supermalloy dots

Jpn. J. Appl. Phys., 42(8) 5038-5039, Aug 1, 2003 Peer-reviewed

Suppression of native oxide growth in sputtered TaN films and its application to Cu electroless plating

J. Appl. Phys., 94(7) 4697-4701, Jul 1, 2003 Peer-reviewed

Off- and On-Time Dependences of Electromigration MTF in Pulsed DC Stressing Tests

Mat. Res. Soc. Symp. Proc., ULSI-XVIII 279-284, Apr 1, 2003 Peer-reviewed

Influence of Surface Oxide of Sputtered TaN on Displacement Plating of Cu

Jpn. J. Appl. Phys., 42(4B) 1843-1846, Apr 1, 2003 Peer-reviewed

Electroless Plating of Cu Initiated by Displacement Reaction on Metal-Nitride Diffusion Barriers

Electrochem. Solid-State Letters, 6(3) C38-C41, Mar 1, 2003 Peer-reviewed

Fabrication of ultra high density ferromagnetic column arrays by porous alumina template for magnetic recording media

T. Shimizu, K. Morimoto, M. Nagayanagi, Y. Fujii, O. Yaegashi, G. R. Wu, H. Sakaue, T. Takahagi, S. Shingubara

Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003, 62-63, 2003

Bottom-up fill of copper in high aspect ratio via holes by electroless plating

S Shingubara, Z Wang, O Yaegashi, R Obata, H Sakaue, T Takahagi

2003 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, 147-150, 2003

Computer-Aided Chemistry Estimation Method of Electronic-polarization Dielectric Constant for the Molecular Design of Low-k Materials

Jpn. J. Appl. Phys., 42(1) 157-161, Jan 1, 2003 Peer-reviewed

DIRECT ELECTROLESS PLATING OF COPPER ON METAL NITRIDE DIFFUSION BARRIERS

The 19th VLSI Multilevel Interconnect Conference, 147-155, Nov 1, 2002

Direct Electroless Plating of Copper on Barrier Metals

Proc. of the 2002 Internaional Interconnect Conference, 176-178, May 1, 2002

Formation of Al Nanodot Array by the Combination of Nano-Indentation and Anodic Oxidation

Mat. Res. Soc. Symp. Proc., 705 133-138, Apr 1, 2002 Peer-reviewed

Fabrication of two- and three-dimensional structures of nanoparticles using LB method and DNA hybridization

Mat. Res. Soc. Symp. Proc., 704 47-52, Apr 1, 2002 Peer-reviewed

Improved Mechanical Strength of Porous Diamond Film by Silane coupler

Mat. Res. Soc. Symp. Proc., ULSI-XVII 313-318, Apr 1, 2002 Peer-reviewed

Direct Electroless Copper Plating on Barrier Metals without Pd Catalyst

Mat. Res. Soc. Symp. Proc., ULSI-XVII 185-190, Apr 1, 2002 Peer-reviewed

Evaluation of Temperature Rise Due to Joule Heating and Preliminary Investigation of I’ts Effect on Electromigration Reliability

S. Shingubara, S. Miyazaki, 高萩隆行

American Institute of Physics Proceedings, 612 94-104, Apr 1, 2002 Peer-reviewed

Formation of Al Dot Hexagonal Array on Si Using Anodic Oxidation and Selective Etching

Jpn. J. Appl. Phys., 41(3B) L340-L343, Mar 1, 2002 Peer-reviewed

Adsorbed Water on a Silicon Wafer Surface Exposed to Atmosphere

Jpn. J. Appl. Phys., 40(11) 6198-6201., Nov 1, 2001 Peer-reviewed

Effect of Pd Catalyst Adsorption on Cu Filling Characteristics in Electroless Plating

Mat. Res. Soc. Symp. Proc., ULSI-XVI 229-234, Nov 1, 2001 Peer-reviewed

Improved Mechanical Strength of Porous Diamond Film by Silane Coupler

Abstracts of Advanced Metallization Conf.(AMC2001), 196-197, Oct 1, 2001

Improved Mechanical Strength of Porous Diamond Film by Silane Coupler

Abstracts of Advanced Metallization Conf. Asian Session (ADMATA2001), 196-197, Oct 1, 2001

Low Dielectric Constant Porous Diamond Film Composed of Diamond Nano-Particles

Mat. Res. Soc. Symp. Proc., ULSI-XVI 647-652, Oct 1, 2001 Peer-reviewed

Study of a Dielectric Constant Due to Electronic Polarization Using a Semiemprical Molecular Orbital Method I

Jpn. J. Appl. Phys., 40(8) 4829-4836, Aug 1, 2001 Peer-reviewed

Experimental Condition for a Highly Ordered Monolayer of Gold Nanoparticles Fabrication by the Lagumuir-Blodgett Method

J. Vac. Sci. Technol. B, 19(6) 2045-2049, Jun 1, 2001 Peer-reviewed

Fabrication of nanohole array on Si using self-organized porous alumina mask

J. Vac. Sci. Technol. B, 19(5) 1901-1904, May 1, 2001 Peer-reviewed

Scanning Electron Microscope Observation of Heterogeneous Three-Dimensional Nanoparticle Array Using DNA

Jpn. J. Appl. Phys., 40(5B) L521-L523, May 1, 2001 Peer-reviewed

Wet preparation of defect-free hydrogen-terminated silicon wafer surface and its characterization in atomic-scale

Solid State Phenomena, 76-77 105-110, Apr 1, 2001 Peer-reviewed

Wet preparation of defect-free hydrogen-terminated silicon wafer surface and its characterization in atomic-scale

T Takahagi, S Shingubara, H Sakaue

ULTRA CLEAN PROCESSING OF SILICON SURFACES 2000, 76-77 105-110, 2001 Peer-reviewed

Atomic-scale defect control on hydrogen-terminated silicon surface at wafer scale

H Sakaue, S Fujiwara, S Shingubara, T Takahagi

APPLIED PHYSICS LETTERS, 78(3) 309-311, Jan, 2001 Peer-reviewed

Formation of A Large Scale Langmuir-Blodgett Monolayer of Alkanethiol-Encapsulated Gold Particles

J. Vac. Sci. Technol. B, 19(1) 115-120, Jan 1, 2001 Peer-reviewed

Well Size Controlled Colloidal Gold Nanoparticles Dispersed in Organic Solvents

Jpn. J. Appl. Phys., 40(1) 346-349, Jan 1, 2001 Peer-reviewed

Low Dielectric Constant Porous Diamond Film Composed of Diamond Nano-Particles

Abstracts of Advanced Metallization Conf. Asian Session(ADMATA2000), 175-176, Oct 1, 2000

Low Dielectric Constant Porous Diamond Film Composed of Diamond Nano-Particles

Abstracts of Advanced Metallization Conf. US Session(AMC2000), 85-86, Oct 1, 2000

Electrical Properties of Self-Organized Nanostructures of Alkanethiol-Encapsulated Gold Particles

J. Vac. Sci. Technol. B, 18(6) 2653-2657, Jun 1, 2000 Peer-reviewed

Self-Organized Gold Nanodots Array On A Silicon Substrate And Its Mechanical Stability

Jpn. J. Appl. Phys., 38(12A) L1488-L1490, Dec 1, 1999 Peer-reviewed

Perfect Control of Hydrogen-Terminated Silicon Wafer Surface

Proc.of 9th International Conference on Production Engineering, 871-876, Sep 1, 1999

Two-dimensional nanowire array formation on Si substrate using self-organized nanoholes of anodically oxidized aluminum

S Shingubara, O Okino, Y Sayama, H Sakaue, T Takahagi

SOLID-STATE ELECTRONICS, 43(6) 1143-1146, Jun, 1999 Peer-reviewed

Correlation Between Agglomeration of a Thin Film and Reflow Filling in a Contact Hole for Sputtered Al Films

J. Vac. Sci. Technol. B, 17(6) 2553-2558, Jun 1, 1999 Peer-reviewed

Electromigration Reliability Study of a GMR Spin Valve Devices

Mat. Res. Soc. Symp. Proc., 563 145-150, Apr 1, 1999 Peer-reviewed

Control of Interdot Space and Dot Size in a Two-Dimensional Gold Nanodot Array

Jpn. J. Appl. Phys., 38(4B) L473-L476, Apr 1, 1999 Peer-reviewed

Self-Organization of a Two-Dimensional Array of Gold Nanodots Encapsulated by Alkanethiol

Jpn. J. Appl. Phys., 37(12B) 7198-7201, Dec 1, 1998 Peer-reviewed

Wafer-Scale Self-Organization of Periodic Step/Terrace Structure on Hydrogen-Terminated Si Surface

1998 International Conf.on Solid State Devices and Materials, 434-435, Sep 1, 1998

Ordered Two-Dimensional Nanowire Array Formation Using Self-Organized Nanoholes of Anodically Oxidized Aluminum

Jpn. J. Appl. Phys., 36(12B) 7791-7795, Dec 1, 1997 Peer-reviewed

Self-Organization of Periodic Step/Terrace Structure on Hydrogen-Terminated Si Surface

JRCAT International Workshop on Science and Technology of Hydrogen-Terminated Silicon Surfaces, 11-12, Nov 1, 1997

Al Nano-Structure Formation using Selective Reactivity of Step/Terrace Structure of Hydrogen-terminated Si(111) Surface

4th International Symp. on Atomically Controlled Surfaces and Interfaces, 345, Oct 1, 1997

Highly Selective SiO2 Etching Using CF4/C2H4

Jpn. J. Appl. Phys., 36(4B) 2477-2481, Apr 1, 1997 Peer-reviewed

Scanning Tunneling Microscopy Observation on The Atomic Structures of Step Edges and Etch Pits on a NH4F-Treated Si(111) Surface

Jpn. J. Appl. Phys., 36(3B) 1420-1423, Mar 1, 1997 Peer-reviewed

Highly Selective SiO2 Etching Using CF4/C2H4

Proc. of Symp. on Dry Process, 141-146, Nov 1, 1996

Scanning Tunneling Microscopy Observation on the Atomic structures of Step Edges and Etch Pits on NH4F-Treated Si(111) Surface

1996 International Conf. on Solid State Devices and Materials, 392-394, Aug 1, 1996

Fabrication of a Si Nanometer Column PN Junction and Implanted Defect Evaluation by Transmission Electron Microscopy

Jpn. J. Appl. Phys., 35(2B) 1045-1048, Feb 1, 1996 Peer-reviewed

Aluminum-Selective Chemical Vapor Deposition Induced by Hydrogen Desorption on Silicon

Jpn. J. Appl. Phys., 35(2B) 1010-1013, Feb 1, 1996 Peer-reviewed

GaAs/Si optoelectronic design and development at Hiroshima university

S Yokoyama, K Miyake, T Nagata, H Sakaue, S Miyazaki, Y Horiike, A Iwata, T Ae, M Koyanagi, M Hirose

SEMICONDUCTOR CHARACTERIZATION, 599-604, 1996 Peer-reviewed

Al-Selective CVD Induced by Hydrogen Desorption on Si

1995 International Conf. on Solid State Devices and Materials, 926-928, Aug 1, 1995

Study of Fluorination Process of H-terminated Si Surface by Xenon Fluoride Exposure

The 8th Intern. MicroProcess Conf., 172-173, Jul 1, 1995

GaAs/Si Optoelectronic Design and Development at Hiroshima University

International Workshop: Semiconductor Characterization, 1-5, Apr 1, 1995 Peer-reviewed

TEM Observation of the Damages in Heavily Ion-implanted Fine Si Columns

Mat. Res. Soc. Symp. Proc., 354 641-646., Apr 1, 1995 Peer-reviewed

GaAs/Si Optoelectronic Design and Development at Hiroshima Universit

Proc. Intern. Workshop of Semicon. Character.(Gaithersburg= USA), 599-604, Apr 1, 1995 Peer-reviewed

固体表面分析(II)

坂上弘之

講談社, 482-492, Apr 1, 1995

Fabrication and Evaluation of Three Dimensional Optically Coupled Common Memory

Jpn. J. Appl. Phys., 34(2B) 1246-1248, Feb 1, 1995 Peer-reviewed

Resistance Oscillations Induced by Direct Current Electromigration

Jpn. J. Appl. Phys., 34(2B) 1030-1036, Feb 1, 1995 Peer-reviewed

Fabrication and evaluation of three-dimensional optically coupled common memory

Kouji Miyake, Tohru Namba, Kenji Hashimoto, Hiroyuki Sakaue, Seiichi Miyazaki, Yasuhiro Horiike, Shin Yokoyama, Mitsumasa Koyanagi, Masataka Hirose

Japanese Journal of Applied Physics, 34(2S) 1246-1248, 1995 Peer-reviewed

Profile Information

Research History

Education

Papers

Menu