&nbsp;&nbsp;We provided formation conditions of (001)-oriented epitaxial Fe_2-XTi_XO₃ (X=0.0&sim;1.0) films by activated reactive evaporation technique. Structural and magnetic properties of the films depended on both the composition and the substrate temperature. The lower substrate temperature below 600&deg;C brought about disordered Ti and Fe ions within the hexagonal oxygen lattices having the same symmetry as hematite (R3c). While the films with X≧0.75 prepared at higher temperature of 700&deg;C were formed into the ordered structure as ilmenite (R3). The ordered films with 0.75≦X<1.0 were strong ferrimagnetic though the spontaneous moments were fairly small than the ideal values.