ONO Takahito

J-GLOBAL         Last updated: Jan 8, 2019 at 19:27
 
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Name
ONO Takahito
URL
http://db.tohoku.ac.jp/whois/e_detail/9437bbad4da00a4e714145cc3846969a.html
Affiliation
Tohoku University
Section
Graduate School of Engineering Department of Mechanical Systems Engineering Functional Systems Engineering Micro-Nanomechanical Architectonics
Job title
Professor
Other affiliation
Tohoku University

Research Areas

 
 

Committee Memberships

 
Apr 2010
 - 
Today
電気学会E部門誌  副編集委員長
 
Apr 2007
 - 
Today
Microprocesses and Nanotechnology Conference (MNC 2007)  プログラム委員
 
May 2008
 - 
Mar 2016
戦略的創造事業(CREST) ナノシステム  アドバイザー
 
Dec 2009
 - 
Sep 2012
センサ・マイクロマシンと応用システム  論文委員長
 
Oct 2009
 - 
Mar 2012
電気学会E部門誌  役員
 

Awards & Honors

 
Mar 2005
財団法人トーキン科学振興財団 研究奨励賞, 財団法人トーキン科学振興財団
 
Jun 2004
近接場光増強のための表面プラズモングリッドの作製, 電気学会E部門総合研究会優秀論文賞, 電気学会
Winner: 河野高博、小野崇人、後藤顕也、江刺正喜
 
Oct 2003
Fabrication of High-accuracy Microtranslation Table for Near-filed Optical Data Storage actuated by Interted Scratch-Drive Actuator, MNC 2002 Paper Award, 15th International Microprocess and Nanotechnology Conference organizing committee
Winner: Y. Kanamori, H. Yahagi, T. Ono, M. Sasaki, K. Hane
 
Aug 2003
Asia-Pacific International Conference on Near-Field Optics Best Paper, The 4th Asia-Pacific International Conference
Winner: 岩見健太郎、小野崇人、江刺正喜
 

Published Papers

 
Jinhua Li, Minjie Zhu, Zhonglie An, Zhuqing Wang, Masaya Toda, Takahito Ono
Journal of Power Sources   401 204-212   Oct 2018
© 2018 Elsevier B.V. The rapid development of sensor networks for smart industry requires comparable tiny power sources that can deliver high energetic performance and be mass-produced via the existed semi-conductor process. In this paper, novel 3...
Thermochimica Acta   668 110-115   Oct 2018
© 2018 Elsevier B.V. We have proposed thin film cantilever thermal biosensor with simple thermocouple structure. Silicon as a high seebeck coefficient material is used to fabricate high sensitivity thermal sensor. The thermocouple thermal sensor w...
S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido
Review of Scientific Instruments   89    Oct 2018
© 2018 Author(s). We developed a microwave oscillator and a micro electromechanical systems-based rubidium cell for the miniaturization of atomic clocks. A thin-film bulk acoustic resonator (FBAR) having a resonant frequency of the fundamental mod...
Microelectronics Journal   79 1-6   Sep 2018
© 2018 Elsevier Ltd We investigated the impact of etch angles on cell characteristics of 3D NAND flash memory structures. The cell characteristics were extracted from simulations with an empirical etch profile, which was analyzed through compariso...
Advanced Materials Technologies   3    Aug 2018
© 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Flexible force sensors based on graphene/polymer nanocomposites have attracted tremendous attention owing to their remarkable sensitivity and ease of fabrication. In the present study, nanocompos...
Microsystem Technologies   1-8   Jun 2018
© 2018 Springer-Verlag GmbH Germany, part of Springer Nature We present a useful method to increase interfacial strength for micro fluidic system of calorimetry biosensor. The micro-sandglass shaped posts were fabricated by deep silicon reactive i...
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2018-January 715-718   Apr 2018
© 2018 IEEE. We applied a 3.5-GHz-band thin film bulk acoustic resonator (FBAR) to a voltage controlled oscillator (VCO), which is designed as a local oscillator of miniaturized atomic frequency standards (AFSs). This frequency reference instead o...
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2018-January 1261-1264   Apr 2018
© 2018 IEEE. In this research, an assembled micro-tube resonator for mass sensing in liquid is fabricated and evaluated. The fabrication process of this assembled micro-tube resonator is simply combining three different fabrications of a groove pa...
Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2018-January 1253-1256   Apr 2018
© 2018 IEEE. This work reports the electrically driven ion transport in nanopores fabricated by a metal assisted chemical etching (MACE) method. The nanopores with approximate 15 nm diameter and 200 μm height were successful produced by MACE. Ion ...
Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2018-January 1044-1047   Apr 2018
© 2018 IEEE. This paper shows the evaluation of piezpresistive property of a vanadium oxide (VOx) film. The VOx film is deposited and patterned as a piezoresistor on an edge of suspended silicon (Si) membrane. The VOx resistor, electrode pads conn...
Qian Yu, Tianfeng Zhou, Yonggang Jiang, Xing Yan, Zhonglie An, Xibin Wang, Deyuan Zhang, Takahito Ono
Applied Surface Science   435 617-625   Mar 2018
© 2017 To improve the mechanical properties of nickel-phosphorus (Ni-P) mold material for glass molding, an ultrasonic-assisted electroless plating method is proposed for the synthesis of graphene-enhanced nickel-phosphorus (G-Ni-P) composite film...
Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono
Nanotechnology   29    Mar 2018
© 2018 IOP Publishing Ltd. In this work, we report a simple and low-cost way to create nanopores that can be employed for various applications in nanofluidics. Nano sized Ag particles in the range from 1 to 20 nm are formed on a silicon substrate ...
Ioana Voiculescu, Meiyong Liao, Marjan Zakerin, Rüdiger Berger, Takahito Ono, Masaya Toda
Sensors and Actuators, A: Physical   271 356-363   Mar 2018
© 2018 Elsevier B.V. This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond cantilever beam. The thermal decomposition of calcium carbonate (CaCO 3 ) was examined using this method and was d...
Nguyen Van Toan, Naoki Inomata, Nguyen Huu Trung, Takahito Ono
Journal of Micromechanics and Microengineering   28    Feb 2018
© 2018 IOP Publishing Ltd. This work describes the fabrication and evaluation of the Knudsen pump for on-chip vacuum pumping that works based on the principle of a thermal transpiration. Three AFM (atomic force microscope) cantilevers are integrat...
Nguyen Van Toan, Naoki Inomata, Nguyen Huu Trung, Takahito Ono
Proceedings of the International Conference on Power Electronics and Drive Systems   2017-December 550-552   Feb 2018
© 2017 IEEE. This work reports the fabrication and evaluation of Knudsen pump for on-chip vacuum pumping. Three AFM (atomic force microscope) cantilevers are integrated into small chambers with a size of 5 mm × 3 mm × 0.4 mm for the pump's evaluat...
Trung Nguyen Huu, Toan Nguyen Van, Ono Takahito
Applied Energy   210 467-476   Jan 2018
© 2017 Elsevier Ltd The harvest of thermal energy using the thermoelectric (TE) effect is one of the potential methods for body area network power sources. This paper demonstrates a new approach of an electrochemical deposition process to fabricat...
International Journal of Automation Technology   12 15-23   Jan 2018
© 2018, Fuji Technology Press. All rights reserved. Microelectromechanical systems (MEMS) and micro-total analysis systems (μTAS) have been developed using microfabrication technologies. As MEMS and μTAS contribute to smaller, higher-performance, ...
Process Biochemistry      Jan 2018
© 2018 Elsevier Ltd Enzyme immobilization method in packaged freestanding microfluidic channel is developed for biomolecule assembly of biosensor in this research. A new micro fluidic fabrication method is proposed to fabricate freestanding fluidi...
IEEJ Transactions on Electrical and Electronic Engineering      Jan 2018
© 2018 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc. This letter reports the design, fabrication, and evaluation of logic gates including NAND and NOR gates which are composed of electrically driven nanoelectro...
Microsystem Technologies      Jan 2018
© 2018, Springer-Verlag GmbH Germany, part of Springer Nature. This paper demonstrates a novel resonant magnetic sensor that utilizes a concentrator to obtain a large magnetic-field gradient. A silicon-cantilevered resonator, with a 10-µm-diameter...
Nguyen Van Toan, Naoki Inomata, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering   12    Dec 2017
© 2017 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc. This paper reports on the patterning of a high-aspect-ratio aluminum-doped zinc oxide (AZO) capacitive resonator based on the combination of the deep reactiv...
Naoki Inomata, Nguyen Van Toan, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering   12    Dec 2017
© 2017 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc. The piezoresistive property of an aluminum (Al)-doped zinc oxide (AZO) thin film (thickness = 20 nm) is evaluated using a microfabricated silicon cantilever ...
Akhtar Muhammad Shahrukh, Zhonglie An, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology   16 931-938   Nov 2017
© 2002-2012 IEEE. In this paper, an electrodeposition method for nickel (Ni)-multiwalled carbon nanotubes (MWCNTs) composite thin films is presented. The composite film is deposited using an electrolyte in which MWCNTs are randomly dispersed. Two ...
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Advanced Engineering Materials   19    Nov 2017
© 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim This work reports the patterning silicon pillars by metal-assisted chemical etching (MACE) process as a post process on a silicon cantilever for a moisture detection. Although the cantilever is v...
Nguyen Van Toan, Takahito Ono
Japanese Journal of Applied Physics   56    Nov 2017
© 2017 The Japan Society of Applied Physics. In this paper, we review the progress in recent studies on the performance enhancement methods for capacitive silicon resonators. We provide information on various fabrication technologies and design co...
Minjie Zhu, Jinhua Li, Masaya Toda, Takahito Ono
Journal of Micromechanics and Microengineering   27    Oct 2017
© 2017 IOP Publishing Ltd. A scanning probe with nitrogen vacancy (NV) centers in diamond thin film was fabricated via a standard micro/nano electromechanical system process. The diamond thin film was selectively grown by microwave plasma enhanced...
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
Journal of Micromechanics and Microengineering   27    Oct 2017
© 2017 IOP Publishing Ltd. Although the electrochemical deposition of thermoelectric materials is a potential method for applications such as flexible thermoelectric power generators (FTEGs), to date the use of this technique is limited. This pape...
Akiou Kikuchi, Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, Seiji Samukawa, Seiji Samukawa
Journal of Applied Physics   122    Oct 2017
© 2017 Author(s). We fabricated a high-density array of silicon nanowires (SiNWs) with a diameter of 10 nm embedded in silicon germanium (SiGe 0.3 ) to give a composite thin film for thermoelectric device applications. The SiNW array was first fab...
Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Yunheub Song, Takahito Ono
Micromachines   8    Oct 2017
© 2017 by the authors. This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced ...
Naoki Inomata, Takahito Ono
Japanese Journal of Applied Physics   56    Aug 2017
© 2017 The Japan Society of Applied Physics. In this paper, the geometry dependence of the temperature coefficient of resonant frequency (TCRF) is investigated and compared with a theoretical thermal stress change using Si mechanical microresonato...
Nguyen Van Toan, Nguyen Van Nha, Yunheub Song, Takahito Ono
Sensors and Actuators, A: Physical   262 99-107   Aug 2017
© 2017 Elsevier B.V. This work reports the design, fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines. A combination of capacitive transduction and piezoresistive actuation based on a piezoresistive heat e...
Wataru Suwa, Naoki Inomata, Masaya Toda, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   822-825   Jul 2017
© 2017 IEEE. This paper reports a novel resonant magnetic sensor using a magnetic gradient field formed by a magnetic concentrator consisted of asymmetric and facing two permalloy plates. A Si cantilever with a size of 5×15×200 μm 3 is placed betw...
Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   2223-2226   Jul 2017
© 2017 IEEE. This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond cantilever beam. The thermal decomposition of calcium carbonate (CaCO 3 ) was examined using this method. The diamond cant...
Nguyen Van Toan, Nguyen Van Nha, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   456-459   Jul 2017
© 2017 IEEE. This work reports on capacitive silicon resonators with piezoresistive heat engines. The resonant body is divided into many parts which are connected each other by small piezoresistive beams to enhance the electromechanical transducti...
Gaopeng Xue, Masaya Toda, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1096-1099   Jul 2017
© 2017 IEEE. The vacuum packaged cantilever with a small magnet is fabricated successfully, and applied to map the magnetic field and radical density at the ambient atmosphere based on magnetic force sensing. The 1.5-μm-thick Si cantilever with a ...
Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology   16 567-573   Jul 2017
© 2002-2012 IEEE. This paper presents a metal-assisted chemical etching (MACE) method for high aspect silicon structures. Ultrahigh aspect trenches and pillars of 400 and 80, respectively, have been achieved using MACE. A survey of the MACE method...
Minjie Zhu, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology   16 545-550   Jul 2017
© 2002-2012 IEEE. Nitrogen vacancy (NV - ) centers possess exceptional sensitivity to magnetic field even under ambient condition. The optically detectable electron spins and the atomic size make it a promising candidate for the advanced magnetic ...
Naoki Inomata, Libao Pan, Zhuqing Wang, Mitsuteru Kimura, Takahito Ono
Microsystem Technologies   23 2873-2879   Jul 2017
© 2016, Springer-Verlag Berlin Heidelberg. A highly sensitive thermal measurement device based on a vanadium oxide (VO x ) microthermistor is developed for detecting biological molecules based on enzymatic reactions. The measurement principle of t...
Inomata Naoki, Saito Kazuya, Ono Takahito
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   23(5) 1201-1205   May 2017   [Refereed]
Nguyen Van Toan Sangu, Suguru Saito, Tetsuro Inomata, Naoki Ono, Takahito
Microsyst. Technol.   23(4) 919-927   Apr 2017   [Refereed]
Seo, Yong-Jun Harii, Kazuya Takahashi, Ryo Chudo, Hiroyuki Oyanagi, Koichi Qiu, Zhiyong Ono, Takahito Shiomi, Yuki Saitoh, Eiji
Appl. Phys. Lett.   110(13) 132409   Mar 2017   [Refereed]
Toda, Masaya Inomata, Naoki Ono, Takahito Voiculescu, Ioana
IEEJ Trans. Electr. Electron. Eng.   12(2) 153-160   Mar 2017   [Refereed]
Kikuchi, Akiou Yao, Akifumi Mori, Isamu Ono, Takahito Samukawa, Seiji
Appl. Phys. Lett.   110(9) 091908   Feb 2017   [Refereed]
Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   652-655   Feb 2017
© 2017 IEEE. This work reports the patterning of high aspect aluminum doped zinc oxide (AZO) for nanowall hollows and capacitive resonators by deep reactive ion etching (deep RIE) and atomic layer deposition (ALD). Nanowall hollows with 50 nm in t...
Nguyen Van Toan, Suguru Sangu, Yoshisuke Ansai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   1347-1350   Feb 2017
© 2017 IEEE. This work reports the reversible low voltage electrowetting and liquid oscillation with SiO 2 capillary window for optical imaging. The optical window with and without Grycerol liquid penetration into SiO 2 capillaries has been demons...
Jinhua Li, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   0 861-864   Feb 2017
© 2017 IEEE. We report a type of MEMS-technique processable micro-supercapacitors built on 3D graphene nanowall (GNW)/Ni core-shell electrodes. While the growth of GNW on quartz glass and other conductive substrates were rationally revealed, the m...
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   0 1232-1235   Feb 2017
© 2017 IEEE. Pillars formed by metal assisted chemical etching (MACE) process as a post process on a silicon cantilever are presented in this work. Although the cantilever is very fragile, the patterning of the pillar structures on the cantilever ...
Yong Jun Seo, Yong Jun Seo, Kazuya Harii, Kazuya Harii, Ryo Takahashi, Ryo Takahashi, Hiroyuki Chudo, Hiroyuki Chudo, Koichi Oyanagi, Takahito Ono, Yuki Shiomi, Yuki Shiomi, Eiji Saitoh, Eiji Saitoh, Eiji Saitoh, Eiji Saitoh
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   1177-1180   Feb 2017
© 2017 IEEE. We have fabricated ultra-sensitive nanomechanical resonators with an integrated non-local spin valve structure. The obtained sensitivity is 1.42 × 10 -17 N for the flexural mode and 1.68 × 10 -18 N for the torsional mode, which indica...
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   805-808   Feb 2017
© 2017 IEEE. The harvest of thermal energy using thermoelectric (TE) effect is one of the potential methods for wearable devices. This paper demonstrates a new approach of electrochemical deposition to fabricate flexible thermoelectric generators ...
Nguyen Huu Trung Sakamoto, Kei Nguyen Van Toan Ono, Takahito
Materials   10(2)    Feb 2017   [Refereed]
Masaya Toda, Ning Xia, Naoki Inomata, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   137 28-31   Jan 2017
© 2017 The Institute of Electrical Engineers of Japan. A calorimetric determination of protein concentration for a picoliter (pL) liquid sample is proposed using a microfluidic calorimeter on a thermally isolated membrane. The concentration measur...
Takahito Ono, Ryuji Yokokawa
IEEJ Transactions on Sensors and Micromachines   137 123   Jan 2017
Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   137 245-246   Jan 2017
© 2017 The Institute of Electrical Engineers of Japan. A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-...
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   970-973   2017   [Refereed]
Nguyen Van Toan Sangu, Suguru Inomata, Naoki Ono, Takahito
Microsyst. Technol.   22(12) 2835-2840   Dec 2016   [Refereed]
Belbachir, Remi Yacine An, Zhonglie Ono, Takahito
Microsyst. Technol.   22(12) 2811-2820   Dec 2016   [Refereed]
Xue, Gaopeng Toda, Masaya Ono, Takahito
J. Microelectromech. Syst.   25(6) 989-998   Dec 2016   [Refereed]
Nguyen Van Toan Sangu, Suguru Ono, Takahito
J. Micromech. Microeng.   26(11) 115018   Nov 2016   [Refereed]
Li, Jinhua Zhu, Minjie Wang, Zhuqing Ono, Takahito
Appl. Phys. Lett.   109(15) 153901   Oct 2016   [Refereed]
Van Toan, Nguyen Shimazaki, Tsuyoshi Ono, Takahito
Micro Nano Lett.   11(10) 591-594   Oct 2016   [Refereed]
Yeh, Sih-Ling Lin, Yu-Ching Tsai, Yao-Chuan Ono, Takahito Wu, Tsung-Tsong
Ultrasonics   71 106-110   Sep 2016   [Refereed]
Nguyen Van Toan Sangu, Suguru Ono, Takahito
J. Microelectromech. Syst.   25(4) 668-674   Aug 2016   [Refereed]
Nguyen Van Toan Sangu, Suguru Ono, Takahito
J. Micromech. Microeng.   26(7 SI) 075016   Jul 2016   [Refereed]
An, Zhonglie Toda, Masaya Ono, Takahito
Compos. Pt. B-Eng.   95 137-143   Jun 2016   [Refereed]
Nguyen Van Toan Hahng, Shim Song, Yunheub Ono, Takahito
Micromachines   7(5) 76   May 2016   [Refereed]
Inomata, Naoki Pan, Libao Toda, Masaya Ono, Takahito
Jpn. J. Appl. Phys.   55(3) 037201   Mar 2016   [Refereed]
Nguyen Van Toan Toda, Masaya Ono, Takahito
Micromachines   7(3)    Mar 2016   [Refereed]
Li, Jinhua An, Zhonglie Wang, Zhuqing Toda, Masaya Ono, Takahito
ACS Appl. Mater. Interfaces   8(6) 3969-3976   Feb 2016   [Refereed]
Yamada, Taito Inomata, Naoki Ono, Takahito
Jpn. J. Appl. Phys.   55(2) 027001   Feb 2016   [Refereed]
Kawai, Yusuke Kim, Jin-Hyeok Inomata, Naoki Ono, Takahito
Sens. Mater.   28(2) 131-139   2016   [Refereed]
Inomata, Naoki Toda, Masaya Ono, Takahito
Lab Chip   16(18) 3597-3603   2016   [Refereed]
Inomata, Naoki Pan, Libao Toda, Masaya Ono, Takahito
PROC IEEE MICR ELECT   1042-1045   2016   [Refereed]
Li, Jinhua An, Zhonglie Ono, Takahito
PROC IEEE MICR ELECT   554-557   2016   [Refereed]
An, Zhonglie Toda, Masaya Ono, Takahito
PROC IEEE MICR ELECT   528-531   2016   [Refereed]
Xue, Gaopeng Toda, Masaya Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   980-981   2016   [Refereed]
Latif, Imran An, Zhonglie Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   925-927   2016   [Refereed]
Akhtar, Muhammad Shahrukh An, Zhonglie Toda, Masaya Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   904-906   2016   [Refereed]
Wang, Zhuqing Li, Jinhua Kimura, Mitsuteru Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   681-682   2016   [Refereed]
Mochimaru, Yuva Toda, Masaya Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   676-677   2016   [Refereed]
Kikuchi, Akiou Yao, Akifumi Mori, Isamu Yamashita, Ichiro Ono, Takahito Samukawa, Seiji
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   505-507   2016   [Refereed]
Li, Jinhua Wang, Zhuqing Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   624-626   2016   [Refereed]
Nguyen Huu Trung Nguyen Van Toan Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   423-425   2016   [Refereed]
Zhu, Minjie Toda, Masaya Ono, Takahito
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   210-213   2016   [Refereed]
Wang, Zhuqing Kimura, Mitsuteru Inomata, Naoki Ono, Takahito
2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)      2016   [Refereed]
Nguyen Van Toan Sangu, Suguru Ono, Takahito
2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)      2016   [Refereed]
Lin, Yu-Ching Tsai, Yao-Chuan Ono, Takahito Liu, Pan Esashi, Masayoshi Gessner, Thomas Chen, Mingwei
Adv. Funct. Mater.   25(35) 5677-5682   Sep 2015   [Refereed]
An, Zhonglie He, Liang Toda, Masaya Yamamoto, Go Hashida, Toshiyuki Ono, Takahito
Nanotechnology   26(19) UNSP 195601   May 2015   [Refereed]
Seo, Yong-Jun Toda, Masaya Ono, Takahito
J. Micromech. Microeng.   25(4) 045015   Apr 2015   [Refereed]
Toda, Masaya Yokoyama, Atsushi Nguyen Van Toan Inomata, Naoki Ono, Takahito
Microsyst. Technol.   21(3) 649-654   Mar 2015   [Refereed]
Sabri, Mohd Faizul Mohd Ono, Takahito Said, Suhana Mohd Kawai, Yusuke Esashi, Masayoshi
J. Microelectromech. Syst.   24(1) 80-90   Feb 2015   [Refereed]
An, Zhonglie Toda, Masaya Yamamoto, Go Hashida, Toshiyuki Ono, Takahito
PROC IEEE MICR ELECT   401-404   2015   [Refereed]
Hayashi, Hideki Toda, Masaya Ono, Takahito
PROC IEEE MICR ELECT   344-347   2015   [Refereed]
Xue, Gaopeng Toda, Masaya Ono, Takahito
PROC IEEE MICR ELECT   14-17   2015   [Refereed]
Iizuka, Hiro Ono, Takahito
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   560-563   2015   [Refereed]
Xue, Gaopeng Toda, Masaya Ono, Takahito
2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC)   83-88   2015   [Refereed]
Highly Sensitive Thermal Micro Sensor with PN Junction for Thermal Measurements of a Single Cell
Taito Yamada, Nanoki Inomata, and Takahito Ono
International Microprocesses and Nanotechnology Conference   27 6C-6-4   Nov 2014
A Si nanowire probe with a Nd-Fe-B magnet for force detection
Yongjun Seo, Masaya Toda, Yusuke Kawai, and Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム      Oct 2014
A long bar type silicon resonator with a high quality factor
Nguyen Van Toan,Masaya Toda, Yusuke Kawai and Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム      Oct 2014
Micro thermionic power generator with low operation temperature
Remi Yacine Belbachir, and Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム      Oct 2014
An electrostatically driven microstage with capacitive displacement sensor for low temperature operation
Gaopeng Xue, Masaya Toda, Liang He, Yusuke Kawai and Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム      Oct 2014

Misc

 
N. V. Toan, M. Toda, T. Ono
16th International Conference on Nanotechnology - IEEE NANO 2016   720-723   Nov 2016
© 2016 IEEE. This work reports on metal assisted chemical etching (MACE) for high aspect silicon structures. Ultra-high aspect trenches and pillars of 400 and 80, respectively, have been achieved by MACE. Additionally, a cantilever fabrication bas...
I. Voiculescu, F. Liu, T. Ono, M. Toda
Sensors and Actuators, A: Physical   242 58-66   May 2016
© 2016 Elsevier B.V. All rights reserved. This paper presents the theoretical and experimental temperature profiles along a microcantilever beam operated in liquid and employed in this research as a temperature sensor. The main application of this...
Jinhua Li, Zhonglie An, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2016-February 554-557   Feb 2016
© 2016 IEEE. This paper reports the fabrication of a silicon micromirror with graphene-nickel (Ni) nanocomposite beams, and evaluate the mechanical stability of the mirror in terms of resonant frequency. A novel pulse-reversed electroplating metho...
Ioana Voiculescu, Masaya Toda, Takahito Ono, Fei Liu
Nanocantilever Beams: Modeling, Fabrication and Applications   411-429   Jan 2016
N. V. Toan, S. Hahng, S. Hahng, Yunheub Song, T. Ono
Advanced Materials - TechConnect Briefs 2016   4 91-94   Jan 2016
This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. The silicon through-wafer interconnects have been investigated by gla...
Nguyen Van Toan, Suguru Sangu, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   136 41-42   Jan 2016
© 2016 The Institute of Electrical Engineers of Japan. This paper presents an optical window capable of the integration of an image sensor for the application of optical modulators. The optical window consists of high aspect ratio SiO 2 pillars th...
Takahito Ono, Masaya Toda, Yong Jun Seo, Naoki Inomata
ECS Transactions   66 123-129   Jan 2015
© The Electrochemical Society. Resonant sensors for ultimate sensing are developed. By scaling down, the sensitivity of a magnetic resonance force microscopy probe is improved, and three-dimensional imaging of radical density in a poly-10-(4-vinyl...
Gaopeng Xue, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   135 236-237   Jan 2015
© 2015 The Institute of Electrical Engineers of Japan. This letter reports a novel chip-level microassembly technology to construct an XYZ-microstage with large displacements into X-, Y-, Z-directions. The main parts of the XYZ-microstage, consist...
Naoki Inomata, Masaya Toda, Takahito Ono
MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences   69-71   Jan 2015
� 15CBMS-0001. We have developed a highly sensitive thermal detection device based on a Si double-supported resonator to measure a heat from single cells. The double-supported resonators are expected to have a large temperature coefficient of th...
Yusuke Kawai, Chuan Yu Shao, Kyosuke Kotani, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   135 98-102   Jan 2015
© 2015 The Institute of Electrical Engineers of Japan. A micro-assembly technique for microstructures using a silicon clip mechanism is developed for a time-of-flight scanning force microscope (TOF-SFM) probe with an electrostatically driven actua...
Ting Wei Liu, Yao Chuan Tsai, Yu Ching Lin, Takahito Ono, Shuji Tanaka, Tsung Tsong Wu
AIP Advances   4    Dec 2014
© 2014 Author(s). This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. ...
Zhonglie An, Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
Proceedings of the IEEE Conference on Nanotechnology   888-892   Nov 2014
© 2014 IEEE. In this paper, we present the fabrication and characterization of a silicon micromirror with carbon nanotubes (CNTs)-nickel (Ni) nanocomposite beams, and evaluate the mechanical stability of the micromirror in terms of resonant freque...
Remi Yacine Belbachir, Zhonglie An, Takahito Ono
Journal of Micromechanics and Microengineering   24    Aug 2014
The demand for safe and clean energy sources has become more important than ever worldwide. Thermionic power generation is one of these energy sources, which directly converts heat into electrical energy using thermionic electrons. We developed a ...
Masaaki K. Sato, Masaya Toda, Naoki Inomata, Hisataka Maruyama, Yuko Okamatsu-Ogura, Fumihito Arai, Takahito Ono, Akihiko Ishijima, Yuichi Inoue
Biophysical Journal   106 2458-2464   Jun 2014
Mammalian cells must produce heat to maintain body temperature and support other biological activities. Methods to measure a cell's thermogenic ability by inserting a thermometer into the cell or measuring the rate of oxygen consumption in a close...
Ting Wei Liu, Yu Ching Lin, Yao Chuan Tsai, Takahito Ono, Shuji Tanaka, Tsung Tsong Wu
Applied Physics Letters   104    May 2014
This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristi...
Masanori Kobayashi, Hidetoshi Miyashita, Naoki Inomata, Takahito Ono
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics   32    Mar 2014
© 2014 American Vacuum Society. A thin film of boron nitride (BN) is synthesized on an Si substrate using BCl 3 and NH 3 as source gases via thermal chemical vapor deposition. Cubic BN (c-BN) is preferentially synthesized when an Fe thin film is u...
Nguyen Van Toan, Nguyen Van Toan, Masaya Toda, Masaya Toda, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   134    Feb 2014
This paper presents a long bar type silicon resonator with a high quality (Q) factor and an evaluation of the hermetic packaged device. This research aims at developing the integration technology of the capacitive silicon resonator on LSI for appl...
Zhonglie An, Zhonglie An, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   134 38-39   Feb 2014
We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the compos...
Liang He, Masaya Toda, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Mamoru Omori, Toshiyuki Hashida, Rüdiger Berger, Takahito Ono
Microsystem Technologies   20 201-208   Feb 2014
A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process fr...
Nguyen Van Toan, Nguyen Van Toan, Masaya Toda, Masaya Toda, Yusuke Kawai, Takahito Ono
Journal of Micromechanics and Microengineering   24    Feb 2014
This paper presents a capacitive silicon resonator with movable electrode structures to reduce the motional resistance for lower insertion loss and lower phase noise, and also increase the tuning frequency range for the compensation of temperature...
Yong Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   134 166-167   Jan 2014
Silicon nanowires have attracted considerable attention due to their excellent mechanical and electrical properties and widely investigated for various applications. One of the exciting applications is magnetic resonance force microscopy (MRFM), w...
Yosuke Mitsui, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   134 270-275   Jan 2014
© 2014 The Institute of Electrical Engineers of Japan. In this paper, we report on the behavior of a nonlinear coupled thin Si resonator. Nonlinear resonators exhibit stochastic resonance (SR) response by applying a noise, in which the resonator s...
Nguyen Van Toan, Nguyen Van Toan, Tomohiro Kubota, Halubai Seknar, Seiji Samukawa, Seiji Samukawa, Takahito Ono
9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014   1-5   Jan 2014
© 2014 IEEE. We present the fabrication and evaluation of silicon micromechanical resonators fabricated by neutral beam etching (NBE) to obtain narrow capacitive gap size for small motional resistance and low insertion loss. The resonant frequency...
Tsung Tsong Wu, Ting Wei Liu, Yu Ching Lin, Yao Chuan Tsai, Takahito Ono, Shuji Tanaka
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings      Jan 2014
This paper presents result of Love wave propagation in a quartz substrate coated with a phononic thin film. In such a phononic structure, large acoustic band gaps with strong reflection for the Love waves are existed. The frequency range and Love ...
Nguyen Van Toan, Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   1245-1248   Jan 2014
This paper presents the design and fabrication of a capacitive silicon resonator with movable electrodes to obtain smaller capacitive gap widths, which results in smaller motional resistance and lower insertion loss. It also helps to increase the ...
Tsung Tsong Wu, Meng Jhen Chiou, Yu Ching Lin, Takahito Ono
Proceedings of SPIE - The International Society for Optical Engineering   8994    Jan 2014
This paper presents results on the numerical and experimental studies of focusing of Lamb waves in an AT-cut quartz gradient-index phononic crystal (GRIN PC) plate lens. The band structures of square-latticed AT-cut quartz phononic crystal plates ...
産産学連携によるMEMS-LSI融合技術
小野崇人, 江刺正喜
Interlab   110 11-16   Mar 2014
Zhonglie An, Zhonglie An, Masaya Toda, Takahito Ono
Carbon   75 281-288   Jan 2014
In this paper, we present a new synthesis method of carbon nanotubes (CNTs)-copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. Deposition of a Cu layer...
Yong Jun Seo, Masaya Toda, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   151-154   Jan 2014
In this study, we have fabricated a 210 nm-wide and 32 μm-long Si nanowire probe with a Si mirror from a silicon-on-insulator wafer. Additionally, a Nd-Fe-B magnet is mounteded at the end of the nanowire for magnetic force detection in MRFM measur...
Takuya Saito, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   134 154-158   Jan 2014
A novel pyro/piezo-electric energy converter, which is based on pyroelectric and piezoelectric energy conversion caused by periodic temperature and pressure change of a ferroelectric material, is developed. A bulk lead-zirconate-titanate (PZT) cer...
Masanori Kobayashi, Hidetoshi Miyashita, Takahito Ono
2013 26th International Vacuum Nanoelectronics Conference, IVNC 2013      Dec 2013
A thin film of boron nitride is synthesized on a Si substrate using BCl3 and NH3 as source gases, by thermal chemical vapor deposition. Cubic boron nitride (c-BN) is preferentially synthesized using a Fe thin film. The c-BN film exhibits negative ...
Takuya Saito, Yusuke Kawai, Takahito Ono
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   2280-2283   Dec 2013
A novel thermoelectric energy generator, which is based on pyroelectric power generation caused by periodic temperature change of a ferroelectric material, is developed. A bulk lead-zirconate-titanate (PZT) ceramic is attached on a bimetal disk. T...
Yosuke Mitsui, Yusuke Kawai, Takahito Ono
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   2013-2016   Dec 2013
In this paper, we report on the mechanical coupling of the stochastic resonance (SR) in 100 nm-thick Si cantilevered resonators. Nonlinear resonators exhibit SR response by applying noise, in which the resonator shows two vibration states. The SR ...
Tatsuyuki Tanahashi, Masaya Toda, Masaya Toda, Hidetoshi Miyashita, Takahito Ono
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   2509-2512   Dec 2013
A miniature Fourier transform infrared spectrometer (FTIR) is designed and fabricated. The spectrometer consists of an electrostatically-driven Si wishbone interferometer (size: 8 × 8 mm 2 ), Si capacitive displacement sensor, light source with an...
Naoki Inomata, Takahito Ono
Japanese Journal of Applied Physics   52    Nov 2013
A thermal sensor probe with a Si resonator in a cavity for thermal insulation was designed and fabricated to measure a heat from fluidic samples in an atmosphere. The resonant thermal sensor was isolated in a cavity in a probe to decrease a vibrat...
Hidetoshi Miyashita, Chen Shuai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines   133    Oct 2013
In this research we fabricated a thermionic power generator with 10 μm gap. The thermionic power generator has an emitter and a collector. The emitter and the collector are separated with the gap via insulation spacers. A Si wafer coated by a W th...
Biao Luo, Esashi Masayoshi, Ikeue Naokatsu, Tanaka Shuji, Ono Takahito, Ying Wu
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering   11 430-435   Sep 2013
In this paper, a micro electro mechanical systems (MEMS) angular rate sensor is designed, fabricated and tested. Silicon bars are used for supporting and vibrating structures. Electromagnetic force is used to create reciprocating movement in the d...
Nguyen Van Toan, Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Masaya Toda, Yusuke Kawai, Takahito Ono
Microsystem Technologies   19 1165-1175   Aug 2013
The design, fabrication and packaging process of silicon resonators capable of the integration of LSI (Large Scale Integration) have been developed on the basis of packaging technology using an LTCC (Low Temperature Co-fired Ceramic) substrate. Th...
Masaya Toda, Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono
Microsystem Technologies   19 1049-1054   Jul 2013
Suspended bimaterial microchannel resonator devices have been fabricated to measure the thermal behaviors of small biological molecules and individual cells in liquid. A resonant microbridge structure embeds this microfluidic channel in its interi...
Akira Wada, Yuuki Yanagisawa, Batnasan Altansukh, Tomohiro Kubota, Takahito Ono, Satoshi Yamasaki, Seiji Samukawa, Seiji Samukawa
Journal of Micromechanics and Microengineering   23    Jun 2013
The mechanism behind the degradation of the mechanical properties of silicon (Si) microcantilevers caused by plasma-induced surface defects was investigated. The resonant frequency (f) and quality factor (Q factor) were deteriorated by defects gen...
Nguyen Van Toan, Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   377-380   Apr 2013
In this paper, silicon resonators were hermetically packaged on basis of anodic bonding of Si and LTCC (Low Temperature Co-fired ceramic) substrates. This research aims at developing the integration technology of the resonator on LSI (Large Scale ...
Yujiro Tanaka, Hidetoshi Miyashita, Masayoshi Esashi, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   504-507   Apr 2013
An optically controllable photocathode array made of Si with carbon nanotubes (CNTs) has been developed. The CNTs were grown on apex of Si tips with pn junction. The Si tips were formed on a Si membrane. Laser intensity dependence on IV characteri...
Jinhyeok Kim, Yusuke Kawai, Naoki Inomata, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   580-583   Apr 2013
In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress g...
Kentaro Totsu, Masaaki Moriyama, Yukio Suzuki, Takahito Ono, Shinya Yoshida, Masayoshi Esashi
Proceedings of the International Display Workshops   2 1405-1408   Jan 2013
© 2013 ITE and SID. We offer a hands-on-access fabrication facility for MEMS and semiconductor research and development. The facility is located at Jun-ichi Nishizawa Memorial Research Center, Tohoku University, and started in 2010. The principle ...
Akira Wada, Akira Wada, Tomohiro Kubota, Yuuki Yanagisawa, Batnasan Altansukh, Batnasan Altansukh, Seiji Samukawa, Seiji Samukawa, Tatahito Ono, Kazuhiro Miwa
Proceedings of IEEE Sensors      Dec 2012
To fabricate high reliability Micro Electro Mechanical Systems (MEMS) devices, damage-free etching with high aspect three-dimensional (3D) structure is important. Plasma etching resulted in profile anomaly near high aspect 3D structure due to dist...
Tomotaka Yabe, Yasuhiro Mimura, Hirokazu Takahashi, Atsushi Onoe, Sho Muroga, Masahiro Yamaguchi, Takahito Ono, Masayoshi Esashi
Electronics and Communications in Japan   95 49-56   Nov 2012
Integration of three-dimensional microcoils on high-performance RF-LSI is one of the key technologies to realize future wireless telecommunication services and hypersensitive capacitance sensor systems. We designed and fabricated monolithic three-...
Zhonglie An, Masayoshi Esashi, Takahito Ono
Japanese Journal of Applied Physics   51    Nov 2012
In this paper, the mass detection of hydrogen adsorption using a piezoresistive resonant silicon microresonator is presented. The working principle relies on the resonant frequency shifts of the cantilevered resonator with a sample due to hydrogen...
Naoki Inomata, Masaya Toda, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   108-111   May 2012
High-sensitive heat detection sensor with a microfluidic chip is proposed, fabricated and evaluated, and also heat detection of a brown fat cell (BFC) has been demonstrated. The measurement principle relies on resonant thermal sensor, where the re...
Keitaro Tanno, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   563-566   May 2012
In this paper, the synchronization of coupled resonators is investigated. Mechanically coupled three resonators are fabricated, and the synchronized condition of these resonators is evaluated. When the frequency of external driving force approache...
Eiji Higurashi, Nobuhiko Nishiyama, Takeru Amano, Akio Higo, Hiroyuki Ishii, Jun Mizuno, Masashi Nakao, Takahito Ono, Shinichi Saito, Takanori Shimizu, Yoshimasa Sugimoto, Junichi Takahara, Masayuki Izutsu
IEICE Transactions on Electronics   E95-C 117   Jan 2012

Books etc

 
ナノ計測を可能にするツール
小野 崇人 (Part:Joint Work, 45-50)
Jan 2012   
集積化マイクロステージ
小野崇人 (Part:Joint Work, アクチュエータ -研究開発の最前線- (pp.126-130))
エヌティーエス出版   Jul 2011   
近接場のセンシング・イメージング技術への応用-最新のバイオ・化学・デバイス分野への展開-
民谷栄一、小野崇人 (Part:Joint Work, 第4章 MEMSプローブ(pp.42-54))
シーエムシー出版   Nov 2010   
エネルギーハーべスティング技術の最新動向
小野崇人 (Part:Joint Work, 第3章 熱電子発電(pp.164-170))
シーエムシー出版   Oct 2010   
MEMS/NEMS工学全集
小野崇人 (Part:Joint Work, pp.330-333、pp. 486-489、pp.740-745)
テクノシステム   Apr 2009   

Conference Activities & Talks

 
飯塚啓、小野崇人
低電圧駆動Siナノ電気機械スイッチ
電気学会全国大会   19 Mar 2014   
Synthesis and mechanical property of carbon nanotubes-nickel composite
Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida and Takahito Ono
電気学会全国大会   19 Mar 2014   
真空中細胞観察のための薄膜Si窓を有するマイクロチャネル
林秀樹,戸田雅也,小野崇人
第61 回応用物理学会春季学術講演会   19 Mar 2014   
化学気相堆積法により成膜した立方晶BNからの電界放出特性
小林正典,宮下英俊,猪股直生,小野崇人
第61 回応用物理学会春季学術講演会   17 Mar 2014   
CAPACITIVE SILICON RESONATOR STRUCTURE WITH MOVABLE ELECTRODES TO REDUCE CAPACITIVE GAP WIDTHS BASED ON ELECTROSTATIC PARALLEL PLATE ACTUATION
Nguyen Van Toan and Takahito Ono
IEEE International Conference on Micro Electro Mechanical Systems   26 Jan 2014   

Patents

 
3809500 : 近接場光露光マスク及びその製造方法並びに近接場光露光装置及び近接場光露光方法

Others

 
Aug 2011   LSI集積化Siマイクロタイミングデバイスの研究
LSI上にシリコンの振動子を作る研究
Aug 2010   静電駆動型マイクロ化フーリエ変換型赤外分光器
マイクロ化したフーリエ変換型赤外分光器に関する研究
Oct 2009   走査型マルチプローブ超高密度記録のための電気的双安定記録媒体の研究
マルチプローブを利用したポリマー記録について、マックスプランク研究所と研究を進める。
Apr 2009   環境モニタリングのためのマイクロ化赤外分光器
マイクロ化した分光器を開発する。
Jul 2007   マイクロシステム融合研究開発拠点
学内の研究者が中心となりマイクロシステムを融合する研究開発拠点を形成する。