2015年3月1日
Micro-assembly of electrostatically driven scanning force microscopy probe using clip mechanism
IEEJ Transactions on Sensors and Micromachines
- ,
- ,
- ,
- 巻
- 135
- 号
- 3
- 開始ページ
- 98
- 終了ページ
- 102
- DOI
- 10.1541/ieejsmas.135.98
© 2015 The Institute of Electrical Engineers of Japan. A micro-assembly technique for microstructures using a silicon clip mechanism is developed for a time-of-flight scanning force microscope (TOF-SFM) probe with an electrostatically driven actuator. Microsprings formed by deep reactive-ion etching are used for the clip micromechanism. Cantilever-shaped microelements for the TOF-SFM are handled by a manipulator, and the microgap between the microspring and opposite wall is expanded by pulling the microspring using a microneedle. Then, the microelement is inserted into the micromechanism, and is clipped by releasing the microspring. After assembly, all microelements are fixed with a conductive glue. Electrostatic actuation of the cantilevered microelement is demonstrated. This technique is advantageous in the fabrication of complex three-dimensional microstructures.
- リンク情報
- ID情報
-
- DOI : 10.1541/ieejsmas.135.98
- ISSN : 1341-8939
- eISSN : 1347-5525
- SCOPUS ID : 84923940986