2014年12月
Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range
AIP ADVANCES
- ,
- ,
- ,
- ,
- ,
- 巻
- 4
- 号
- 12
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1063/1.4902018
- 出版者・発行元
- AMER INST PHYSICS
This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the micro-electromechanical system (MEMS) fabrication technology and the resonant performance was evaluated. (C) 2014 Author(s).
- リンク情報
-
- DOI
- https://doi.org/10.1063/1.4902018
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000347170100011&DestApp=WOS_CPL
- URL
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84913580457&origin=inward
- ID情報
-
- DOI : 10.1063/1.4902018
- ISSN : 2158-3226
- SCOPUS ID : 84913580457
- Web of Science ID : WOS:000347170100011