MISC

2014年12月

Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range

AIP ADVANCES
  • Ting-Wei Liu
  • ,
  • Yao-Chuan Tsai
  • ,
  • Yu-Ching Lin
  • ,
  • Takahito Ono
  • ,
  • Shuji Tanaka
  • ,
  • Tsung-Tsong Wu

4
12
記述言語
英語
掲載種別
DOI
10.1063/1.4902018
出版者・発行元
AMER INST PHYSICS

This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the micro-electromechanical system (MEMS) fabrication technology and the resonant performance was evaluated. (C) 2014 Author(s).

リンク情報
DOI
https://doi.org/10.1063/1.4902018
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000347170100011&DestApp=WOS_CPL
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84913580457&origin=inward
ID情報
  • DOI : 10.1063/1.4902018
  • ISSN : 2158-3226
  • SCOPUS ID : 84913580457
  • Web of Science ID : WOS:000347170100011

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