論文

査読有り
2015年6月

Effects of thermal fluctuations and block copolymers compositions on defects in directed self-assembly hole shrink process

JAPANESE JOURNAL OF APPLIED PHYSICS
  • Ken Fukawatase
  • ,
  • Kenji Yoshimoto
  • ,
  • Masahiro Ohshima

54
6
開始ページ
06FE01
終了ページ
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.7567/JJAP.54.06FE01
出版者・発行元
IOP PUBLISHING LTD

We investigated the two critical defects on the directed self-assembly hole shrink process, i.e., polystyrene (PS) residue and placement error, by performing dynamic simulations with the Ohta-Kawasaki model. In the simulations, the thermal noise was added to generate stochastic variations in shape and location of the poly(methyl methacrylate) (PMMA) cylindrical domains. For the PS residue issue, we found that the volume fraction of the PMMA minor block, f(PMMA), was an effective parameter, and that the PS residue could be minimized by increasing f(PMMA) from a conventional value of 0.30 to 0.40. On the other hand, the placement error of the PMMA cylindrical domain was affected little by the change in shape and size of the guide hole and by the connectivity to the guide bottom wall. It is speculated that the interfacial stiffness between the PMMA and PS domains would be essential to control the placement error of the PMMA cylindrical domains. (C) 2015 The Japan Society of Applied Physics

リンク情報
DOI
https://doi.org/10.7567/JJAP.54.06FE01
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000358264900007&DestApp=WOS_CPL
ID情報
  • DOI : 10.7567/JJAP.54.06FE01
  • ISSN : 0021-4922
  • eISSN : 1347-4065
  • Web of Science ID : WOS:000358264900007

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