2006年8月
Fabrication of two-dimensional photonic crystal slab point-defect cavity employing local three-dimensional structures
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
- ,
- ,
- ,
- 巻
- 45
- 号
- 8A
- 開始ページ
- 6096
- 終了ページ
- 6102
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1143/JJAP.45.6096
- 出版者・発行元
- INST PURE APPLIED PHYSICS
The two-dimensional photonic crystal cavities employing local three-dimensional structures are investigated. Donor-type cavities with small and shallow holes are examined as examples of cavities with a local three-dimensional structure. It is shown that both the far-field and near-field patterns of the cavities can be controlled by the addition of small and shallow holes. The fabrication of such structures using a focused ion beam is proposed and investigated. Residual gallium ions, used in fabrication with a focused ion beam, lead to optical absorption; these gallium ions can be removed by heat treatment at 800 degrees C. The near-field pattern of a fabricated three-dimensional cavity is measured, and is shown to be consistent with a theoretical analysis.
- リンク情報
- ID情報
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- DOI : 10.1143/JJAP.45.6096
- ISSN : 0021-4922
- Web of Science ID : WOS:000240512800008