論文

査読有り
2016年6月

Fabrication of photonic crystal structures by tertiary-butyl arsine-based metal-organic vapor-phase epitaxy for photonic crystal lasers

APPLIED PHYSICS EXPRESS
  • Masahiro Yoshida
  • ,
  • Masato Kawasaki
  • ,
  • Menaka De Zoysa
  • ,
  • Kenji Ishizaki
  • ,
  • Ranko Hatsuda
  • ,
  • Susumu Noda

9
6
開始ページ
62702
終了ページ
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.7567/APEX.9.062702
出版者・発行元
IOP PUBLISHING LTD

The fabrication of air/semiconductor two-dimensional photonic crystal structures by air-hole-retained crystal regrowth using tertiary-butyl arsine-based metal-organic vapor-phase epitaxy for GaAs-based photonic crystal lasers is investigated. Photonic crystal air holes with filling factors of 10-13%, depths of similar to 280 nm, and widths of 120-150nm are successfully embedded. The embedded air holes exhibit characteristic shapes due to the anisotropy of crystal growth. Furthermore, a low lasing threshold of similar to 0.5 kA/cm(2) is achieved with the fabricated structures. (C) 2016 The Japan Society of Applied Physics

リンク情報
DOI
https://doi.org/10.7567/APEX.9.062702
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000377795800020&DestApp=WOS_CPL
ID情報
  • DOI : 10.7567/APEX.9.062702
  • ISSN : 1882-0778
  • eISSN : 1882-0786
  • Web of Science ID : WOS:000377795800020

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