2016年6月
Fabrication of photonic crystal structures by tertiary-butyl arsine-based metal-organic vapor-phase epitaxy for photonic crystal lasers
APPLIED PHYSICS EXPRESS
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- 巻
- 9
- 号
- 6
- 開始ページ
- 62702
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.7567/APEX.9.062702
- 出版者・発行元
- IOP PUBLISHING LTD
The fabrication of air/semiconductor two-dimensional photonic crystal structures by air-hole-retained crystal regrowth using tertiary-butyl arsine-based metal-organic vapor-phase epitaxy for GaAs-based photonic crystal lasers is investigated. Photonic crystal air holes with filling factors of 10-13%, depths of similar to 280 nm, and widths of 120-150nm are successfully embedded. The embedded air holes exhibit characteristic shapes due to the anisotropy of crystal growth. Furthermore, a low lasing threshold of similar to 0.5 kA/cm(2) is achieved with the fabricated structures. (C) 2016 The Japan Society of Applied Physics
- リンク情報
- ID情報
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- DOI : 10.7567/APEX.9.062702
- ISSN : 1882-0778
- eISSN : 1882-0786
- Web of Science ID : WOS:000377795800020