1997年3月
New realization method for three-dimensional photonic crystal in the optical wavelength region: Experimental consideration
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
- ,
- ,
- 巻
- 36
- 号
- 3B
- 開始ページ
- 1907
- 終了ページ
- 1911
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- 出版者・発行元
- JAPAN J APPLIED PHYSICS
We experimentally investigate the feasibility of a realization method for the three-dimensional photonic crystal in the optical wavelength region. Micromachining techniques of dry-etching, wafer-bonding and laser beam diffraction pattern observation techniques are utilized. Each process is investigated using an AlGaAs/GaAs semiconductor system, and the feasibility of this method is successfully demonstrated for a structure having a photonic bandgap in the 10 mu m wavelength region.
- リンク情報
- ID情報
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- ISSN : 0021-4922
- Web of Science ID : WOS:A1997WT45700123