論文

査読有り
1997年3月

New realization method for three-dimensional photonic crystal in the optical wavelength region: Experimental consideration

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
  • N Yamamoto
  • ,
  • S Noda
  • ,
  • A Sasaki

36
3B
開始ページ
1907
終了ページ
1911
記述言語
英語
掲載種別
研究論文(学術雑誌)
出版者・発行元
JAPAN J APPLIED PHYSICS

We experimentally investigate the feasibility of a realization method for the three-dimensional photonic crystal in the optical wavelength region. Micromachining techniques of dry-etching, wafer-bonding and laser beam diffraction pattern observation techniques are utilized. Each process is investigated using an AlGaAs/GaAs semiconductor system, and the feasibility of this method is successfully demonstrated for a structure having a photonic bandgap in the 10 mu m wavelength region.

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:A1997WT45700123&DestApp=WOS_CPL
ID情報
  • ISSN : 0021-4922
  • Web of Science ID : WOS:A1997WT45700123

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