This paper describes the development of a model with both chemically and thermally non-equilibrium effects in an SF6 arc plasma during decaying phase with transient recovery voltage (TRV) application. The SF6 arc plasma in decaying phase can be seen in a high voltage SF6 gas circuit breaker during a large current interruption process. The TRV is often applied to the arc plasma, which may elevate the electron temperature T-e than heavy particle temperature T-h. This developed model solves energy equations for electrons and heavy particles, accounting for totally 122 reactions due to 19 species in SF6 arc plasmas. As a result, transient distributions of T-e and T-h were calculated for SF6 arc plasma in a TRV application condition for a fundamental study.