MISC

2013年6月

Passive piezoelectric single-side MEMS DC current sensor with five parallel PZT plates applicable to two-wire DC electric appliances without using cord separator

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
  • Dong F. Wang
  • ,
  • Kohei Isagawa
  • ,
  • Takeshi Kobayashi
  • ,
  • Toshihiro Itoh
  • ,
  • Ryutaro Maeda

19
6
開始ページ
923
終了ページ
927
記述言語
英語
掲載種別
DOI
10.1007/s00542-013-1749-4
出版者・発行元
SPRINGER

A passive (power-less), non-contact macro-scale piezoelectric bimorph DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed at our laboratory previously. In present study however, a MEMS-scale piezoelectric single-side DC current sensor, comprised of five parallel PZT plates, was further proposed and micro-fabricated for preliminarily examination. A micro magnet was fixed by manipulator onto the PZT cantilever tip to the theoretically pinpointed position of the center plate. Different from the results of the macro-scale piezoelectric bimorph DC current sensor, impulsive piezoelectric output voltages accompanying with a gradual decrease in decay were detected when the applied DC electric current was varied from 0.5 to 2.5 A. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was also obtained but with a higher slope compared to the result of the macro-scale piezoelectric bimorph DC current sensor.

リンク情報
DOI
https://doi.org/10.1007/s00542-013-1749-4
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000319359600019&DestApp=WOS_CPL
ID情報
  • DOI : 10.1007/s00542-013-1749-4
  • ISSN : 0946-7076
  • eISSN : 1432-1858
  • Web of Science ID : WOS:000319359600019

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