2013年6月
Passive piezoelectric single-side MEMS DC current sensor with five parallel PZT plates applicable to two-wire DC electric appliances without using cord separator
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
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- 巻
- 19
- 号
- 6
- 開始ページ
- 923
- 終了ページ
- 927
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1007/s00542-013-1749-4
- 出版者・発行元
- SPRINGER
A passive (power-less), non-contact macro-scale piezoelectric bimorph DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed at our laboratory previously. In present study however, a MEMS-scale piezoelectric single-side DC current sensor, comprised of five parallel PZT plates, was further proposed and micro-fabricated for preliminarily examination. A micro magnet was fixed by manipulator onto the PZT cantilever tip to the theoretically pinpointed position of the center plate. Different from the results of the macro-scale piezoelectric bimorph DC current sensor, impulsive piezoelectric output voltages accompanying with a gradual decrease in decay were detected when the applied DC electric current was varied from 0.5 to 2.5 A. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was also obtained but with a higher slope compared to the result of the macro-scale piezoelectric bimorph DC current sensor.
- リンク情報
- ID情報
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- DOI : 10.1007/s00542-013-1749-4
- ISSN : 0946-7076
- eISSN : 1432-1858
- Web of Science ID : WOS:000319359600019