We developed a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. In this study, new designs of the microheater were fabricated and frequency stability of fabricated sensor was compared between the new designs of the microheater. In a design of the microheater, the frequency stability (3 σ) calculated from the frequency change for 60 sec was 1.4 Hz when the sensor was heated to a temperature of 140 degrees Celsius. The design was effective to improve the frequency stability under heating. In addition, identification between methanol and ethanol was carried out by using the sensor.