2013年11月4日
6PM3-PMN-050 昇温脱離式QCMにおいセンサの形状最適化(マイクロセンサとナノ計測,ポスターセッション)
マイクロ・ナノ工学シンポジウム
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- ,
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- 巻
- 2013
- 号
- 5
- 開始ページ
- 225
- 終了ページ
- 226
- 記述言語
- 日本語
- 掲載種別
- 出版者・発行元
- 一般社団法人日本機械学会
We developed a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. In this study, new designs of the microheater were fabricated and frequency stability of fabricated sensor was compared between the new designs of the microheater. In a design of the microheater, the frequency stability (3 σ) calculated from the frequency change for 60 sec was 1.4 Hz when the sensor was heated to a temperature of 140 degrees Celsius. The design was effective to improve the frequency stability under heating. In addition, identification between methanol and ethanol was carried out by using the sensor.
- リンク情報
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- CiNii Articles
- http://ci.nii.ac.jp/naid/110009961109
- CiNii Books
- http://ci.nii.ac.jp/ncid/AA12456946
- ID情報
-
- CiNii Articles ID : 110009961109
- CiNii Books ID : AA12456946