Papers

Peer-reviewed
Sep, 2004

A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution

APPLIED PHYSICS LETTERS
  • L Li
  • ,
  • M Esashi
  • ,
  • T Abe

Volume
85
Number
13
First page
2652
Last page
2654
Language
English
Publishing type
Research paper (scientific journal)
DOI
10.1063/1.1796535
Publisher
AMER INST PHYSICS

A miniaturized biconvex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. A conventional polishing method could not manufacture the miniaturized, spherically convex shape, which is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80 000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid. (C) American Institute of Physics.

Link information
DOI
https://doi.org/10.1063/1.1796535
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000224178300068&DestApp=WOS_CPL
ID information
  • DOI : 10.1063/1.1796535
  • ISSN : 0003-6951
  • Web of Science ID : WOS:000224178300068

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