Papers

Peer-reviewed
Apr, 2011

A Gaussian-shaped AT-cut quartz crystal resonator

SENSORS AND ACTUATORS A-PHYSICAL
  • Takashi Abe
  • ,
  • Hiroki Kishi

Volume
166
Number
2
First page
173
Last page
176
Language
English
Publishing type
Research paper (scientific journal)
DOI
10.1016/j.sna.2010.04.005
Publisher
ELSEVIER SCIENCE SA

This paper reports the design and fabrication of a Gaussian-shaped AT-cut quartz crystal resonator. The thickness distribution of the resonator was designed following a Gaussian-type function. The distribution was based on the analysis of thickness shearing vibration calculated using finite element analysis for a flat-shaped resonator. The vibration analysis showed improvement of the energy trapping effect, and the vibration at the wafer edge was negligible. For the experimental verification, we attempted to fabricate a Gaussian-shaped resonator using microfabrication technologies. The resonant characteristics were substantially improved by the shaping. (C) 2010 Elsevier B.V. All rights reserved.

Link information
DOI
https://doi.org/10.1016/j.sna.2010.04.005
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000289815700001&DestApp=WOS_CPL
ID information
  • DOI : 10.1016/j.sna.2010.04.005
  • ISSN : 0924-4247
  • Web of Science ID : WOS:000289815700001

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