Apr, 2011
A Gaussian-shaped AT-cut quartz crystal resonator
SENSORS AND ACTUATORS A-PHYSICAL
- ,
- Volume
- 166
- Number
- 2
- First page
- 173
- Last page
- 176
- Language
- English
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.1016/j.sna.2010.04.005
- Publisher
- ELSEVIER SCIENCE SA
This paper reports the design and fabrication of a Gaussian-shaped AT-cut quartz crystal resonator. The thickness distribution of the resonator was designed following a Gaussian-type function. The distribution was based on the analysis of thickness shearing vibration calculated using finite element analysis for a flat-shaped resonator. The vibration analysis showed improvement of the energy trapping effect, and the vibration at the wafer edge was negligible. For the experimental verification, we attempted to fabricate a Gaussian-shaped resonator using microfabrication technologies. The resonant characteristics were substantially improved by the shaping. (C) 2010 Elsevier B.V. All rights reserved.
- Link information
- ID information
-
- DOI : 10.1016/j.sna.2010.04.005
- ISSN : 0924-4247
- Web of Science ID : WOS:000289815700001