論文

査読有り
2015年3月1日

Microheater-integrated quartz crystal microbalance array for thermal desorption spectroscopy

IEEJ Transactions on Sensors and Micromachines
  • Jumpei Sakai
  • ,
  • Masayuki Sohgawa
  • ,
  • Naoyuki Iida
  • ,
  • Takashi Abe

135
3
開始ページ
112
終了ページ
113
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1541/ieejsmas.135.112
出版者・発行元
Institute of Electrical Engineers of Japan

In this work, we present a new design involving a microheater-integrated quartz crystal microbalance (QCM) array for thermal desorption spectroscopy. Each QCM consists of two electrodes to excite thickness-shear-mode (TSM) vibrations on the crystal back side and one microheater to increase the temperature on the crystal front side. The resonance frequency was stable when a voltage was applied to the microheater. Carbon microparticles were coated on one of the QCMs for gas adsorption, and its frequency change during the temperature increase was calculated by subtracting the frequency change of an untreated QCM. The proposed QCM array was employed to separate ethanol from methanol. The separation was successful, as confirmed via thermal desorption spectra calculated by differentiating the resonance frequency change with respect to time.

リンク情報
DOI
https://doi.org/10.1541/ieejsmas.135.112
ID情報
  • DOI : 10.1541/ieejsmas.135.112
  • ISSN : 1347-5525
  • ISSN : 1341-8939
  • SCOPUS ID : 84923938377

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