2017
Evaluation of the heating characteristics of miniature QCR-based thermogravimetric sensor in vacuum
IEEJ Transactions on Sensors and Micromachines
- ,
- ,
- Volume
- 137
- Number
- 7
- First page
- 180
- Last page
- 184
- Language
- Japanese
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.1541/ieejsmas.137.180
- Publisher
- Institute of Electrical Engineers of Japan
In this paper, we proposed a miniature thermogravimetric analysis sensor by using quartz crystal microbalance. We optimized the heating electrode shape of the microheater-integrated QCM for measuring a component of the soil on Mars and physically adsorbed water content in the Martian dust. Then, we evaluated the heating properties of the QCM in vacuum environment. As a result, the temperature of the electrode heated up to 300°C. We found out the optimized QCM showed low power consumption and had superior heating properties.
- Link information
- ID information
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- DOI : 10.1541/ieejsmas.137.180
- ISSN : 1347-5525
- ISSN : 1341-8939
- SCOPUS ID : 85021749793