2017年
Deposition and characterization of Al2O3 and BiFeO3 thin films on titanium substrates for tough MEMS devices
IEEJ Transactions on Sensors and Micromachines
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- 巻
- 137
- 号
- 1
- 開始ページ
- 46
- 終了ページ
- 47
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1541/ieejsmas.137.46
- 出版者・発行元
- Institute of Electrical Engineers of Japan
Insulator and piezoelectric thin films were deposited on titanium substrate, and characterized for application in tough MEMS tactile sensors. The titanium substrate was polished by buffing before the deposition of the thin films. An Al2O3 thin film was deposited as an insulator and showed good insulation characteristics on the polished titanium substrate. Piezoelectric BiFeO3 thin films were prepared by RF sputtering. The XRD pattern of the BiFeO3 thin film on the titanium substrate shows the presence of the ferroelectric phase. The polarization-electric field curve also shows a ferroelectric hysteresis loop. The results show that insulator and piezoelectric thin film can be formed on titanium substrate.
- ID情報
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- DOI : 10.1541/ieejsmas.137.46
- ISSN : 1347-5525
- ISSN : 1341-8939
- SCOPUS ID : 85008208899