2016
MASS SENSITIVITY AMPLIFICATION BY USING GAUSSIAN-SHAPED QUARTZ CRYSTAL RESONATOR
2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
- ,
- ,
- ,
- First page
- 1022
- Last page
- 1025
- Language
- English
- Publishing type
- Research paper (international conference proceedings)
- Publisher
- IEEE
This paper reports mass sensitivity amplification in a Gaussian-shaped quartz crystal resonator (Gaussian-shaped QCR). To achieve amplification, a fabrication process for a Gaussian-shaped (not quasi-Gaussian) QCR was developed using photolithographic methods. Sensitivity amplification in the QCR was observed at the central portion. The mass response was three times higher than the theoretical value for gravimetric measurements of thin, uniform films. The optimized height of the shape, evaluated based on the Q factor, is higher than that of the convex shape. This resonator is expected to be applicable to mass measurement of various micro/nanoparticles.
- Link information
- ID information
-
- ISSN : 1084-6999
- Web of Science ID : WOS:000381797300267