Papers

Mar, 2022

Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass

Electrical Engineering in Japan

Naotaka Onda
Takaaki Kozuka
Takashi Abe
Masanobu Isshiki
Satoru Tomeno
Masayuki Sohgawa

Volume: 215
Number: 1
Language
Publishing type: Research paper (scientific journal)
DOI: 10.1002/eej.23370
Publisher: Wiley

Link information

DOI: https://doi.org/10.1002/eej.23370
URL: https://onlinelibrary.wiley.com/doi/pdf/10.1002/eej.23370
URL: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23370

ID information

DOI : 10.1002/eej.23370
ISSN : 0424-7760
eISSN : 1520-6416

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