Micro-drilling characteristics of SiC by harmonics of Nd:YAG laser were experimentally investigated in the viewpoints of wavelength and the surrounding gas type condition. Moreover, plasma and processing behavior were observed to discuss micro-drilling characteristics of SiC. The debris was removed away in the opposite direction of laser beam along the flow field generated by laser irradiation. The behavior, the spectrum and the intensity of laser induced plasma were influenced by the surrounding gas condition. The appearance of plasma affected the surface integrity at the circumference of drilled hole, and the surface integrity could be improved under the reduced pressure condition.