論文

査読有り
2017年

Performance Improvement of HfS2 Transistors by Atomic Layer Deposition of HfO2

IEEE Transactions on Nanotechnology
  • Kanazawa, T.
  • ,
  • Amemiya, T.
  • ,
  • Upadhyaya, V.
  • ,
  • Ishikawa, A.
  • ,
  • Tsuruta, K.
  • ,
  • Tanaka, T.
  • ,
  • Miyamoto, Y.

16
4
開始ページ
582
終了ページ
587
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1109/TNANO.2017.2661403
出版者・発行元
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Hafnium disulfide (HfS2) is one of the transition metal dichalcogenides which is expected to have the high electron mobility and the finite bandgap. However, the fabrication process for HfS2 = based electron devices is not established, and it is required to bring out the superior transport properties of HfS2. In this report, we have investigated the effects of the atomic layer deposited HfO2 passivation on the current properties of HfS2 transistors. HfO2 passivation of the HfS2 surface enhanced the drain current and significantly reduced the hysteresis. Moreover, HfO2 passivation allows the use of a higher annealing temperature and further improvement of the drain current.

リンク情報
DOI
https://doi.org/10.1109/TNANO.2017.2661403
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000405391100008&DestApp=WOS_CPL
URL
http://www.scopus.com/inward/record.url?eid=2-s2.0-85029225442&partnerID=MN8TOARS
ID情報
  • DOI : 10.1109/TNANO.2017.2661403
  • ISSN : 1536-125X
  • eISSN : 1941-0085
  • ORCIDのPut Code : 47640533
  • SCOPUS ID : 85029225442
  • Web of Science ID : WOS:000405391100008

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