Sep 20, 2019
Low temperature synthesis of Al 2 O 3 thin films by low energy electron and oxygen radical irradiation on Al (CH 3 ) 3 condensed layer.
The 80th JSAP Autumn Meeting 2019
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- Language
- Japanese
- Presentation type
- Poster presentation
- Organizer
- The Japan Society of Applied Physics
- Venue
- 北海道大学