The ion beam induced chemical vapor deposition (IBICVD) technique has been successfully used to fabricate Fe and FePt particles. Select area electron diffraction (SAED) patterns were used to study themicrostructure of the Fe and FePt particles. The as-deposited Fe and FePt particles are both amorphous. After being annealed at 600°C for 1 hour, the Fe particles remain amorphous, while the FePt particles are crystallized in fcc structure. The concentric magnetic domain structure has been observed in the as-deposited FePt particles, as revealed by the magnetic force microscopy (MFM) measurement. Measurements of cumulative magnetic properties of as-deposited FePt particles show coercivity of about 70 Oe.